JSTS:Journal of Semiconductor Technology and Science

The Institute of Electronics and Information Engineers (대한전자공학회)
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RF MEMS Devices for Wireless Applications

  • Park, Jae Y. (Materials and Devices Laboratory, LG Electronics Institute of Technology) ;
  • Jong U. Bu (Materials and Devices Laboratory, LG Electronics Institute of Technology) ;
  • Lee, Joong W. (Materials and Devices Laboratory, LG Electronics Institute of Technology)
  • Published : 2001.03.01
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Abstract

In this paper, the recent progress of RF MEMS research for wireless/mobile communications is reviewed. The RF MEMS components reviewed in this paper include RF MEMS switches, tunable capacitors, high Q inductors, and thin film bulk acoustic resonators (TFBARs) to become core components for constructing miniaturized on chip RF transceiver with multi-band and multi-mode operation. Specific applications are also discussed for each of these components with emphasis on for miniaturization, integration, and performance enhancement of existing and future wireless transceiver developments.

Keywords

References

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