Journal of Information Display
- 제2권2호
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- Pages.7-12
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- 2001
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- 1598-0316(pISSN)
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- 2158-1606(eISSN)
Enhanced Crystallization of Amorphous Si Using viscous Ni Solution and Microwave Annealing
- Ahn, Jin-Hyung (Department of Materials Science and Engineering, Korea Advanced Institute of Science and Technology) ;
- Eom, Ji-Hye (Department of Materials Science and Engineering, Korea Advanced Institute of Science and Technology) ;
- Ahn, Byung-Tae (Department of Materials Science and Engineering, Korea Advanced Institute of Science and Technology)
- 발행 : 2001.06.24
초록
A viscous Ni solution was coated over amorphous Si thin film for evenly spread of Ni metal source. The Ni s. prepared by dissolving