나노 기계시스템의 설계 및 구동

Design and Control of Nano-Precision Machine Systems

  • 김승우 (한국과학기술원 기계공학과)
  • Kim, Seung-Woo (Dept. of Mechanical Engineering, Korea Advanced Institute of Science and Technology)
  • 발행 : 2002.01.01

초록

키워드

참고문헌

  1. P. McKeown, 'Manufacturing - how small can we go? The challenge and opportunities of the nanometre age,' The British Association Lecture, 1996
  2. N. Taniguchi, current status in the future trends of ultra precision machining and ultrafine materials processing,' Annals of CIRP 32/2, 573, 1983 https://doi.org/10.1016/S0007-8506(07)60185-1
  3. E. Teague, 'Generating and measuring displacements up to 0.1 m to an accuracy of 0.1 nm: Is it possible?,' SPIE Handbook-The Technology of Proximal Probe Lithography, Edited by C. Marrian, 1993
  4. D. Swyt, 'Uncertainties in dimensional measurements at nonstandard temperatures,' J. of Res. NIST , 1993. Thermacore Inc, 'Heat pipe design guide,' 1994
  5. http://www.mel.nist.gov
  6. http://www.npl.co.uk
  7. http://www.sematech.org
  8. http://ligo.caltech.edu
  9. http://me.kaist.ac.kr/~pem/