한국세라믹학회지 (Journal of the Korean Ceramic Society)

  • 제39권6호
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  • Pages.582-588
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  • 2002
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  • 1229-7801(pISSN)
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  • 2234-0491(eISSN)
한국세라믹학회 (The Korean Ceramic Society)
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Taguchi법을 이용한 Ti/TiO2/IrO2-RuO2전극의 부식특성 최적화

Optimization of Corrosion Properties of Ti/TiO2/IrO2-RuO2 Electrodes via Taguchi Method

  • 이득용 (대림대학 재료공학과) ;
  • 채경선 (기술표준원 생물환경과) ;
  • 최형기 (기술표준원 생물환경과) ;
  • 예경환 (한국항공대학교 항공재료공학과) ;
  • 안중홍 (한국항공대학교 항공재료공학과) ;
  • 송요승 (한국항공대학교 항공재료공학과)
  • 발행 : 2002.06.01
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초록

Ti 기판에 TiO$_2$ 중간층을 플라즈마 용사법으로 증착 후 IrO$_2$-RuO$_2$ 박막을 졸-겔과 dip coating법으로 제조하였다. 코팅 층의 접착력을 향상시키기 위하여 유기화합물과 glass brit을 첨가하였다. Taguchi법의 망대특성과 Lls(2$^1$$\times$3$^{7}$ )의 직교배열표를 이용하여 IrO$_2$-RuO$_2$ 박막의 최적조건인 인자와 수준 조합의 최적화를 전류밀도를 측정 분산분석하였다. 최적의 코팅조건은 각각 ethyl cellulose의 점도는 100cp, 건조온도 및 시간은 17$0^{\circ}C$ 20분, 열처리온도 및 시간은 75$0^{\circ}C$ 10분, 전도성 분말과 glass frit의 무게비는 99:5, 최종열처리시간은 120분, 주입산소량은 5sccm이었다. 분산분석결과, 유의수준이 $\alpha$=0.1인 통계적으로 90%신뢰공정이었다.

IrO$_2$-RuO$_2$ films were deposited on plasma sprayed TiO$_2$ buffer layer above Ti metal by sol-gel and dip-coating method. Organic vehicle (ethyl cellulose and $\alpha$-terpineol) and glass frit were added to improve adherence of the coatings. Taguchi method and L$_{18}$ (2$^1$$\times$3$^{7}$ ) orthogonal arrays were evalvated in terms of current density to determine the optimal combination of levels of factors that best satisfy the bigger is better quality characteristic. The observed conditions were as fellows: ethyl cellulose (100 cp), drying temperature and time (17$0^{\circ}C$,20 min), heat treatment temperature and time (75$0^{\circ}C$,10 min), the weight ratio of IrO$_2$-RuO/powders to glass frit (99:5), final heat treatment time (120 min) and flow rate of air (5 sccm), respectively. ANOVA analysis suggested that the influence of the factors within $\alpha$= 0.1 was significant with a 90% confidence level.

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참고문헌

  1. Electrodes of Conductive Metallic Oxide S. Trasatti;G. Lodi
  2. Thin Solid Films v.169 Effect of Oxygen on the Electrical Transport in RuO₂ L. Krusin-Elbaum
  3. J. Electrochem. Soc. v.135 no.10 Conducting Transition Metal Oxides: Possibilities for RuO₂in VLSI Metallization L. Krusin-Elbaum;M. Wittmer https://doi.org/10.1149/1.2095391
  4. Appl. Phys. Lett. v.50 no.26 Characterization of Reactively Sputtered Ruthenium Dioxide for Very Large Scale Integrated Metallization L. Krusin-Elbaum;M. Wittmer;D. S. Yee https://doi.org/10.1063/1.97673
  5. J. Electrochem. Soc. v.132 no.11 Chemical Vapor Deposition of Ruthenium and Ruthenium Dioxide Films M. L. Green;M. E. Gross;L. E. Papa;K. J. Schnoes;D. Brasen https://doi.org/10.1149/1.2113647
  6. J. Appl. Electrochem. v.24 Long Servie Life$IrO_2/Ta_2O_5$Electrodes for Electroflotation R. Mraz;J. Krysa https://doi.org/10.1007/BF00249891
  7. J. Mater. Sci. in press Application of Taguchi Method and Orthogonal Arrays for Characterization of Corrosion Rate of IrO₂-RuO₂Film K-S. Chae;J-G. Yoon;J-H. Ahn;Y-S. Song;D. Y. Lee
  8. Mater. Lett. Effect of Organic Vehicle Addition on Service Lifetime of$Ti/IrO_2-RuO_2Electrodes K-S. Chae;H-K. Choi;J-H. Ahn;Y-S. Song;D. Y. Lee
  9. J. Corros. Sci. Soc. Kor. v.30 no.4 A Study on Optimization Process of Metal Oxide Coating with Organic Vehicle(in Kor.) K-S. Chae;A-R. Han;H-K. Choi;J-H. Ahn;Y-S. Song;D. Y. Lee
  10. Mater. Sci. & Eng. v.A332 no.1-2 High-temperature Properties of Plasma-sprayed Coatings of YSZ/NiCrAIY on Inconel Substrate Y-S. Song;I-G. Lee;D. Y. Lee;D-J. Kim;S. Kim;K. Lee
  11. Design of Experiments Using the Taguchi Approach R. K. Roy
  12. Corrosion and Corrosion Control(3rd Ed.) H. H. Uhlig;R. W. Revie
  13. J. Kor. Ceram. Soc. v.38 no.9 Glass-alumina Composites Prepared by Melt-infiltration: I. Effect of Alumina Particle Size(in Kor.) D. Y. Lee;J-W. Jang;D-J. Kim;I-S. Park;J-K. Lee;M-H. Lee;B-Y. Kim
  14. J. Kor. Ceram. Soc. v.39 no.2 Glass-alumina Composites Prepared by Melt-infiltration: Ⅱ. Kinetic Studies(in Kor.) D. Y. Lee;J-W. Jang;M-H. Lee;J-K. Lee;D-J. Kim;I-S. Park https://doi.org/10.4191/KCERS.2002.39.2.145