Abstract
It was observed that exchange bias field was increased with smooth surface and better ${\gamma}$-FeMn formation. Sputtering conditions were varied for the control of the surface roughness and ${\gamma}$-FeMn formation. From the results of Cu deposition as underlayer, it was found that ${\gamma}$-FeMn formation was closely related with the thickness of underlayer. After heat treatment, exchange bias field was increased over three times. This improvement was likely that the crystallites of ${\gamma}$-FeMn were well formed. In Co/Cu/Co/FeMn spin valve structure, magnetoresistance was increased over 1.4 times through the heat treatment. This was due to the disappearance of Co/Cu intermixed dead layer and removal of defect, and this was examined by AES analysis.
반강자성 FeMn과 강자성 Co를 이용한 기판/Co/Cu/Co/FeMn 구조의 스핀밸브를 제조하여 자기저항 특성을 조사하였다. Cu를 하지층으로 하여 FeMn 반강자성층을 형성시킨 결과 ${\gamma}$y-FeMn과 고착층 Co와의 교환이방성 결합이 향상되었다. FeMn증착시 Ar 압력과 power를 달리해가며 최적의 FeMn 증착조건을 고찰하였다. 이로부터 FeMn과 Co간의 계면이 평탄해질수록 교환결합의 세기가 증가함을 알 수 있었다. AES 분석으로부터 열처리에 의해 Co와 Cu간 계면고용층이 소멸됨을 확인하였다. 기판/Co/Cu/Co/FeMn 스핀밸브를 열처리함으로써 교환이방성 결합과 자기저항비를 각각 3배와 1.4배 이상 향상시켰다.
