Korean Journal of Optics and Photonics (한국광학회지)

Optical Society of Korea (한국광학회)
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Analysis of a flat-field soft x-ray spectrometer using a 2400-grooves/mm varied line-spacing concave grating

2400 grooves/mm 비등간격 오목에돌이발을 이용하는 평면결상형 연엑스선 분광기의 특성 해석

  • 최일우 (동신대학교 광마이크로디바이스시스템연구센터) ;
  • 남창희 (한국과학기술원 물리학과/결맞는 X-선 연구단)
  • Received : 2002.04.01
  • Published : 2002.06.01
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Abstract

The components and alignment parameters of a flat-field soft x-ray spectrometer used in the wavelength range below 50 $\AA$ are determined, and the characteristics of the spectrometer are analyzed. It consists of a toroidal mirror, a slit, a varied line-spacing concave grating, and a soft x-ray detector. The space-resolved spectral image of a source is formed on a single plane using the tordidal mirror and the 2400-grooves/mm varied line-spacing concave grating. The former is used to compensate for the astigmatism caused by the grazing incidence of soft x-ray light on the concave grating. The spectral and spatial resolutions of the spectrometer are calculated by applying the wave front aberration theory, and the diffraction efficiency is calculated by applying the scalar diffraction theory.

파장 50 $\AA$ 이하의 연엑스선 영역에서 사용될 평면결상형 연엑스선 분광기의 구성요소와 정렬조건을 결정하고 분광기의 분광학적 특성을 해석하였다. 평면결상형 연엑스선 분광기는 토로이드거울, 실틈, 비등간격 오목에돌이발, 연엑스선 검출기로 구성되어 있다. 토로이드거울과 홈간격이 2400 grooves/mm인 비등간격 오목에돌이발을 사용하여 공간분해된 빛띠가 단일 평면 위에 결상되도록 분광기를 구성하였다. 토로이드거울은 연엑스선 광선이 에돌이발에 비스듬하게 입사할 때 발생되는 비점 수차를 보상하기 위해 사용되었다. 파면수차 이론을 적용하여 분광기가 가지는 파장분해와 공간분해를 계산하고, 에돌이 현상에 대한 스칼라 이론을 적용하여 에돌이발의 에돌이효율을 계산하였다.

Keywords

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