Korean Journal of Optics and Photonics (한국광학회지)

Optical Society of Korea (한국광학회)
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Error analysis and performance test of the volumetric interferometer for three dimensional coordinate measurements

삼차원 좌표 측정을 위한 부피 간섭계의 오차분석 및 성능평가

  • 이혁교 (한국과학기술원 기계공학과) ;
  • 주지영 (한국과학기술원 기계공학과) ;
  • 김승우 (한국과학기술원 기계공학과)
  • Published : 2002.12.01
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Abstract

We have recently proposed the new concept of a phase-measuring volumetric interferometer that enables us to accurately measure the xyz-coordinates of the probe without metrology frames. The interferometer is composed of a movable target and a fixed photo-detector array. The target is made of point diffraction sources to emit two spherical wavefronts, whose interference is monitored by an array of photo-detectors. Phase shifting is applied to obtain the precise phase values of the photo-detectors. Then the measured phases are fitted to a geometric model of multilateration so as to determine the xyz-location of the target by minimizing least square errors. The proposed interferometer has been designed and built with a volumetric uncertainty of less than 1.0 $\mu\textrm{m}$ within a cubic working volume of side 120 mm. Here, in this paper, we also present error sources, an evaluated uncertainty, and test results from the prototype system. The self-calibration of two-dimensional precision metrology stages is applied to test the performance of the interferometer.

본 연구에서는 삼차원 공간상에서 절대 좌표를 측정하기 위한 부피 간섭계의 오차원인을 분석하고 각 오차원인이 최종 결과에 미치는 영향을 계산했다. 계산결과 광검출기 배열의 비선형성, 압전소자의 비선형성, 광섬유 내부의 온도변화 둥이 오차의 주요 원인임을 알 수 있다. 제안된 간섭계의 성능을 실험적으로 검증하기 위해 분해능 측정 및 이차원 광학식 스케일과의 비교를 수행했다. 또한 간섭계의 성능을 좀 더 엄밀하게 검증하기 위해 자가보정법을 적용해서 공간상에서 간섭계가 갖는 계통오차를 추출했으며 60mm$\times$60mm$\times$20mm공간에서 최대오차 1 $\mu\textrm{m}$ 이하를 얻었다.

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