대한기계학회논문집A (Transactions of the Korean Society of Mechanical Engineers A)

  • 제26권12호
  • /
  • Pages.2687-2694
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  • 2002
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  • 1226-4873(pISSN)
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  • 2288-5226(eISSN)
대한기계학회 (The Korean Society of Mechanical Engineers)
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구면 반사체를 이용한 3 자유도 변위 측정 기법

A Measuring Method for 3-DOF Displacement by Using Spherical Reflector

  • 권기환 (한양대학교 대학원 정밀기계공학과) ;
  • 문홍기 (한양대학교 대학원 정밀기계공학과) ;
  • 조남규 (한양대학교 기계정보경영공학부)
  • 발행 : 2002.12.01
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초록

A precision displacement measuring system is proposed, which can detect the 3-DOF translational motions of precision positioning devices. The optical system, which is composed of two diode-laser sources and two quadratic PSDs, is adapted to detect the position of the spherical reflector usually mounted on the platform of positioning devices. Each of the laser beams from diode-laser sources is reflected at the highly reflective surface of the sphere; hence, the 3-dimensional position of the sphere causes the directional change of the reflected beams, which is detected by the PSDs. In this paper, we define the relationships between the output values of the two PSDs and the 3-DOF translational motions of the sphere. Based on a deduced measurement model, we perform measurement simulation and evaluate the performance of the proposed measurement system: linearity, sensitivity, measuring range, and measurement error. The results show that the proposed measuring method is very useful for the measurement of the precision displacement of 3-DOF micro motions.

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참고문헌

  1. Jeong-Seok Oh, Chang-Woo Lee, Hyung-Seok Lee and Seong-Woo Kim, 1995, 'A Fine Motion Mechanism of Dual Serv o Control for Ultraprecision Positioning,' Transactions of the KSME, Vol. 19, No. 11, pp. 2875-2884
  2. Kim, J.S. and Chung, S. C., 1998, 'Synthesis of an On-Line 5 Degrees of Freedom Error Measurement System for Translational Motion Rigid Bodies,' Transactions of the KSPE, Vol. 15, No. 5, pp. 93-99
  3. Jenq Shyong Chen, Tzu Wei Kou and Shen Hwa Chiou, 1999, 'Geometric Error Calibration of Multi-Axis Mechines Using an Auto-Alignment Laser Interferometer,' Precision Engineering, Vol. 23, pp. 243-252 https://doi.org/10.1016/S0141-6359(99)00016-1
  4. Kuang-Chao Fan, Mu-Jung Chen, 2000, 'A 6-Degree-Of-Freedom Measurement Systen for the Accuracy of X-Y Stages,' Precision Engineering, Vol. 24, pp. 15-23 https://doi.org/10.1016/S0141-6359(99)00021-5
  5. Mike Holmes, Robert Hocken and David Trumper, 2000, 'The Long-Range Scanning Stage: a Novel Platform for Scanned-Probe Microscopy,' Precision Engineering, Vol. 24, pp. 191-209 https://doi.org/10.1016/S0141-6359(99)00044-6
  6. Mike Holmes, David Trumper, 1996, 'Magnetic/Fluid-bearing Stage for Atomic-Scale Motion Control (the Angstrom Stage),' Precision Engineering, Vol. 18, pp. 38-49 https://doi.org/10.1016/0141-6359(95)00038-0
  7. Renzo Vaccarone, Andrea Pozzo and Rosanna Puppo, 2000, 'A Cryogenic Scanning Stage with Position Control for a Magnetic Microscope,' Physica B: Condensed Matter, Volumes 284-288, part 2, pp. 2115-2116 https://doi.org/10.1016/S0921-4526(99)03015-X
  8. Cuttinoa, J. F., Schinstock, D. E. and Prather, M. J., 1999, 'Three-Dimensional Metrology Frame for Precision Applications,' Precision Engineering, Vol. 23, pp. 103-112 https://doi.org/10.1016/S0141-6359(98)00031-2
  9. Schinstock, D. E. and Cuttino, J. F., 2000, 'Real Time Kinematic Solutions of a Non-Contacting Three Dimensional Metrology Frame', Precision Engineering, Vol. 24, pp. 70-76 https://doi.org/10.1016/S0141-6359(99)00032-X
  10. Park, O. S., Cho, H. S., Byun, Y. K., Park, N. Y. and Jeong, D. G., 1999, 'Measurement of 6-DOF Motions Using a 3-Facet Mirror,' Proceedings of the 14th KACC, pp. C-375-378
  11. Namir C. Shammas, 1996, 'C/C++ Mathematical Algorithms for Scientists and Engineers,' McGraw-Hill