한국진공학회지 (Journal of the Korean Vacuum Society)

한국진공학회 (The Korean Vacuum Society)
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금속 기판 위에 성장한 탄소나노튜브 특성에 관한 연구

Growth of carbon nanotubes on metal substrates using microwave plasma-enhanced chemical vapor deposition

  • 김현숙 (성균관대학교 물리학과) ;
  • 박성렬 (성균관대학교 나노튜브 및 나노복합구조 연구센터) ;
  • 양지훈 (성균관대학교 물리학과) ;
  • 문상현 (성균관대학교 물리학과) ;
  • 박종윤 (성균관대학교 물리학과) ;
  • 박래준 (㈜아이티엘)
  • 발행 : 2002.12.01
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초록

Carbon nanotubes on metal(SUS304) substrates were synthesized by using micro-wave plasma-enhanced chemical vapor deposition at $650^{\circ}C$ with gas mixture CH$_4$(11%) and H$_2$(89%). Their structure was investigated by scanning electron microscopy and transmission electron microscopy. Raman spectroscopy was also used to justify the structure and crystallinity of graphite sheets. High-resolution transmission electron microscopy images clearly showed carbon nanotubes to be multwalled. The measured turn-on field and current density obtained from I-V measurement were 4.4 V/$\mu \textrm{m}$ and $8.4\times10^1\mu\textrm{A}/\textrm{cm}^2$, respectively.

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