The Pumping Characteristics of the Valveless Peristaltic Micropump by the Variation of Design Parameters

  • Chang, In-Bae (Department of Mechanical Engineering and Mechatronics, Kangwon National University) ;
  • Park, Dae-Seob (Graduate School, Department of Mechanical Engineering and Mechatronics, Kangwon National University) ;
  • Kim, Byeng-Hee (Department of Mechanical Engineering and Mechatronics, Kangwon National University) ;
  • Kim, Heon-Young (Department of Mechanical Engineering and Mechatronics, Kangwon National University)
  • Published : 2002.12.01

Abstract

This paper presents the fabrication and performance inspection of a peristaltic micropump by flow simulation. The valve-less micropump using the diffuser/nozzle is consists of base plate, mid plate, top plate and connection tubes fur inlet and outlet. In detail, the base plate is composed of two diffuser nozzles and three chambers, the mid plate consists of a glass diaphragm for the volumetric change of the pumping chamber. The inlet and outlet tubes are connected at the top plate and the actuator fur pressing the diaphragm is located beneath the top plate. The micropump is fabricated on the silicon wafer by DRIE (Deep Reactive ion Etching) process. The pumping performances are tested by the pneumatic test rig and compared with the simulated results fur various dimensions of diffuser nozzles. The pumping characteristics of the micropump by the volumetric change at the pumping chamber is modeled and simulated by the commercial software of FLOW-3D. The simulated results shows that reverse flow is the inherent phenomena in the diffuser nozzle type micropump, but it can be reduced at the dual pumping chamber model.

References

  1. Y. S. Kim, S. S. Yang, Fabrication and Test of a Micropump by Thin Silicon Plate, Journal of KIEE, Vol. 46, No. 7, pp. 1135-1140, 1997
  2. Korea Institute of Science and Technology Information, The investigation of the trends of new technology on Bio-Chip, 2002
  3. E. Stemme and G. Stemme, A Valve-less Diffuser/Nozzle based Fluid Pump, Sensors and Actuators, vol. A39, pp. 159-167, 1993
  4. E. Stemme and G. Stemme, Valve-Less Fluid Pump, Swedish Patent Appl. No. 9300, 604-607, 1993
  5. P. Gravesen, J. Brandebjerg, and 0. S. Jensen, Microfluidics a review, Journal of Micromechanics and Microengineering, vol. 3, pp. 168-182, 1993 https://doi.org/10.1088/0960-1317/3/4/002
  6. S. Shoji and M. Esashi, Microflow devices and systems, Journal of Micromechanics and Microengineering, vol. 4, pp. 157-171, 1994 https://doi.org/10.1088/0960-1317/4/4/001
  7. M. Elwenspoek, T. S. J. Lammerink, R. Miyake, and J. H. J. Fluitman, Towards integrated microliquid handling systems, Journal of Micromechanics and Microengineerin -g, vol. 4, pp. 227-245, 1994 https://doi.org/10.1088/0960-1317/4/4/008
  8. F. M. White, Fluid Mechanics. New York: McGraw-Hill, 1986
  9. J. G. Smits, Piezoelectric Micropump with Three Valves Working Peristaltically,' Sensors and Actuators, vol. A21-A23, pp. 203-206, 1990
  10. R. Zengerle, S. Kluge, M. Richter, and A. Richter, A Bidirectional Silicon Micropump, presented at IEEE 8th International Workshop on Micro Electro Mechanical Systems (MEMS'95), Amsterdam, the Netherlands, Jan. 29 - Feb. 2, 1995
  11. W. Bacher, W. Menz, and W. K. Schomburg, Micropump manufactured by thermoplastic molding, presented at IEEE 7th International Workshop on Micro Electro Mechanical Systems (MEMS'94), Oiso, Japan, January 25-28, 1994
  12. E. H. Klaassen, K. Petersen, J. M. Noworolski, J. Logan, N. I. Maluf, C. Storment, W. McCulley, and G. T. A. Kovacs, Silicon fusion bonding and deep reactive ion etching; a new technology for microstructures, presented at ansducers'95 - Eurosensor IX, Stockholm, Sweden, June 25-29, 1995
  13. T. Gerlach and H. Wurmus, Working principle and performance of the dynamic micropump, Sensor and Actuators, vol. A50, pp. 135-140, 1995
  14. M. Stehr, S. Messner, H. Sandmaier, and R. Zengerle, A New Micropump with Bidirectional Fluid Transport and Selfblocking Effect, presented at IEEE 9th International Workshop on Micro Electro Mechanical Systems (MEMS'96), San Diego, California, USA, February 11-15, 1996
  15. H. T. G. van Lintel, F. C. M. van den Pol, and S. Bouwstra, A piezoelectric micropump based on micromachining in silicon, Sensors and Actuators, vol. 15, pp. 153-167, 1988 https://doi.org/10.1016/0250-6874(88)87005-7
  16. Roland Zengerle and Martin Richter, Simulation of Microfluid System, J. Micromech. Microeng, Vol. 4, pp. 192-204, 1994 https://doi.org/10.1088/0960-1317/4/4/004