KSTLE International Journal

Korean Tribology Society (한국트라이볼로지학회)
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The Pumping Characteristics of the Valveless Peristaltic Micropump by the Variation of Design Parameters

  • Chang, In-Bae (Department of Mechanical Engineering and Mechatronics, Kangwon National University) ;
  • Park, Dae-Seob (Graduate School, Department of Mechanical Engineering and Mechatronics, Kangwon National University) ;
  • Kim, Byeng-Hee (Department of Mechanical Engineering and Mechatronics, Kangwon National University) ;
  • Kim, Heon-Young (Department of Mechanical Engineering and Mechatronics, Kangwon National University)
  • Published : 2002.12.01
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Abstract

This paper presents the fabrication and performance inspection of a peristaltic micropump by flow simulation. The valve-less micropump using the diffuser/nozzle is consists of base plate, mid plate, top plate and connection tubes fur inlet and outlet. In detail, the base plate is composed of two diffuser nozzles and three chambers, the mid plate consists of a glass diaphragm for the volumetric change of the pumping chamber. The inlet and outlet tubes are connected at the top plate and the actuator fur pressing the diaphragm is located beneath the top plate. The micropump is fabricated on the silicon wafer by DRIE (Deep Reactive ion Etching) process. The pumping performances are tested by the pneumatic test rig and compared with the simulated results fur various dimensions of diffuser nozzles. The pumping characteristics of the micropump by the volumetric change at the pumping chamber is modeled and simulated by the commercial software of FLOW-3D. The simulated results shows that reverse flow is the inherent phenomena in the diffuser nozzle type micropump, but it can be reduced at the dual pumping chamber model.

Keywords

References

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