Korean Journal of Materials Research (한국재료학회지)

Materials Research Society of Korea (한국재료학회)
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Chemical States and Microstructures of Anodic TiO2 Layers

양극산화 TiO2 피막의 화학 결합상태와 미세구조

  • Jang, J.M. (School of Advanced materials Engineering, Kookmin University) ;
  • Oh, H.J. (Dept. of Materials Engineeriinf, Hanseo University) ;
  • Lee, J.H. (Dept. of Chemistry, Hanseo University) ;
  • Joo, J.H. (School of Advanced materials Engineering, Kookmin University) ;
  • Chi, C.S. (School of Advanced materials Engineering, Kookmin University)
  • 장재명 (국민대학교 신소재공학부) ;
  • 오한준 (한서대학교 재료공학과) ;
  • 이종호 (한서대학교 화학과) ;
  • 주은균 (국민대학교 신소재공학부) ;
  • 지충수 (국민대학교 신소재공학부)
  • Published : 2002.07.01
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Abstract

Anodic $TiO_2$film on Ti substrate was fabricated at 180V in sulfuric acid solutions containing phosphoric acid and hydrogen peroxide. Effects of the anodizing conditions on the morphology of the oxide layers, and chemical states of the component elements of the layers were studied primarily using SEM, XRD, AFM, and XPS. The pores in the oxide layer was not uniform in size, shape, and growth direction particularly near the interface between the substrate and the oxide layer, compared with those of the surface layer. The formation of irregular type of pores seemed to be attributed to spark discharge phenomena which heavily occurred during increasing the anodic voltage. The pore diameter and the cell size increased, and the number of cells per unit area decreased with the increasing time. From the XPS results, it was shown that component elements of the electrolytes, P and S, existed in the chemical states of $PO_4^{-3}$ , $P_2$$O_{5}$, $SO_4^{-2}$ , $SO_3^{-2}$ , P, S, etc., which were penetrated from the electrolytes into the oxide layer during anodization.

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References

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