Journal of the Korean Ceramic Society (한국세라믹학회지)

The Korean Ceramic Society (한국세라믹학회)
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Fabrication and Characterization of Sn1-xSixO2 Anode for Lithium Secondary Battery by R.F. Magnetron Sputtering Method

R.F. Magnetron Sputtering을 이용한 리튬이차전지 부극용 Sn1-xSixO2의 제조 및 특성

  • Lee, Sang-Heon (School of materials Science & Engineering, Pusan national University) ;
  • Park, Keun-Tae (School of materials Science & Engineering, Pusan national University) ;
  • Son, Young-Guk (School of materials Science & Engineering, Pusan national University)
  • 이상헌 (부산대학교 무기재료공학과) ;
  • 박건태 (부산대학교 무기재료공학과) ;
  • 손영국 (부산대학교 무기재료공학과)
  • Published : 2002.01.01
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Abstract

Tin oxide thin films doped with silicon as anodes for lithium secondary battery were fabricated by R. F. magnetron sputtering technique. The electrochemical results for lithium secondary battery anodes showed that addition of silicon decreases the oxidic state of tin, and, hence, reduced the irreversible capacity during the first discharge/charge cycle. The (110),(101),(211) planes were grown with increasing substrate temperatures. The reversible capacity of thin films fabricated in conditions of $300^{\circ}C$ substrate temperature and 7:3 $Ar:O_2$ ratio was 700 mAh/g.

리튬 이차전지용 부극재료로 미량의 실리콘이 첨가된 주석산화물 박막을 R.F. magnetron sputtering법을 이용하여 제조하였다. 실리콘의 첨가로 인해 주석의 산화상태를 감소시켜서 첫 번째 충방전 동안 비가역성을 감소시키는 전기 화학적 결과를 얻을 수 있었다. 주석 산화물 박막의 결정 배향성은 기판온도가 올라감에 따라서 (110),(101),(211) 면들이 성장하였다. 합성된 박막은 기판온도가 $300^{\circ}C$이고 $Ar:O_2$의 비가 7:3일때, 700mAh/g의 에너지 밀도를 가지며 가장 좋은 가역성능을 보여주었다.

Keywords

References

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