Journal of the Korean Ceramic Society (한국세라믹학회지)

The Korean Ceramic Society (한국세라믹학회)
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Reflection Properties of SiO2/ITO Transparent and Conductive Thin Films for Display

디스플레이용 SiO2/ITO 투명전도막의 반사특성

  • 신용욱 (한국과학기술연구원 나노재료연구센터) ;
  • 김상우 (한국과학기술연구원 나노재료연구센터) ;
  • 윤기현 (연세대학교 세라믹공학과)
  • Published : 2002.01.01
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Abstract

Reflection properties of $SiO_2$/ITO (Indium Tin Oxide) thin films coated for electromagnetic shielding, anti-static and anti-reflection on the front surface in CRT were studied. The behavior of reflectance as a function of thickness of $SiO_2$/ITO was investigated and applied to theoretical anti0reflection model of double layers and three layers. As the thickness of ITO layer increased, the deviation from theoretical value increased because uniformity of film deteriorated by pore. Because of the effect of mixed layer of $SiO_2$ and ITO, experimental reflectance showed better acceptance to the three layer antireflection model of $SiO_2$/$SiO_2$+ITO/ITO than the two layer model. Based on the theoretical antireflection design, the double layer whose thickness of $SiO_2$ and ITO were 90, 65 nm, respectively appear 2.5% in reflectance at standard wavelength, 550 nm. This phenomenon was similar to theoretical reflectance in visual range.

CRT의 전면에 전자파차폐, 정전기 방지 및 저반사 효과를 위해 코팅되는 $SiO_2$/ITO (Indium Tin Oxide) 이층박막의 반사특성에 관하여 연구하였다. 실리카층 및 ITO층의 두께를 변화시키며 나타나는 반사율의 경향을 고찰하고, 이론적인 2층, 3층 저반사코팅의 디자인에 적용시켜 보았다. 입자 상으로 코팅된 ITO는 두께가 증가할수록 기공에 의해 박막의 불균일성이 증가하면서 이론적인 반사모델과의 차이가 커졌다. 실리카와 ITO의 계면에 존재하는 혼합층의 영향으로 인하여 실제측정반사율은 2층으로 디자인한 이론반사율보다 $SiO_2$/$SiO_2$+ITO/ITO의 3층으로 디자인한 반사모델에 보다 잘 적용되었다. 이론적인 저반사 디자인은 근거로 $SiO_2$/ITO 박막의 두께를 90, 65 nm로 조절한 이층막은 기준파장에서 2.5%의 반사율을 나타내었고, 가시광선 영역에서 이론반사율과 유사한 거동을 보였다.

Keywords

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