Journal of the Korean Ceramic Society (한국세라믹학회지)

The Korean Ceramic Society (한국세라믹학회)
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Characterization of Transparent TiO2 Power and Thin Films through Sol-Gel Process

졸-겔법을 이용한 투과성 TiO2 분말 및 박막의 특성 연구

  • Jung, Mie-Won (Department of Chemistry, Sungshin Women's University) ;
  • Lee, Zee-Young (Department of Chemistry, Sungshin Women's University) ;
  • Son, Hyun-Jin (Department of Chemistry, Sungshin Women's University)
  • Published : 2002.01.01
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Abstract

Transparent $TiO_2$ thin films prepared by sol-gel process using the modification of titanium(IV) alkoxide showed improved thermal stability and high refraction index. Compared to the pure $TiO_2$ film, the modified $TiO_2$ films show the increased index of refraction under proper condition at pH 2.5. Transparency of these $TiO_2$ thin films were more than 80% in the visible region. It has been demonstrated that the reaction occurs in the amorphous phase: an exchange of phase results in anatase before and after 400$^{\circ}C$, in rutile over 700$^{\circ}$C form the XRD results. The particle sizes, shapes and structures of these nanoclusters in the $TiO_2$ films have been identified through a SEM and XRD. The physical properties and structures of their powders have also been studied through a SEM, XRD, TGA and DSC. The thickness and index of refraction have been determined by the analysis of ellipsometric spectra.

Titanium(IV) isopropoxide에 킬레이팅 리간드로 Acetylacetone(Acac), Ethyl-acetoacetate(Etac) 그리고, Ethanolamine을 첨가시켜 변형된 티타늄 알콕사이드를 합성한 후 졸-겔 방법으로 투과성 티타늄 산화물 박막을 제조하였다. 박막 제조 조건이 최적의 상태일 때는 티타니아 졸 용액의 농도가 3wt% 이하이고, 리간드로는 Acetyl acetone(Acac)를 선택하고, pH가 2.5로 조절하였을 때였다. 순수한 티타늄 산화물 박막보다는 리간드가 치환된 박막들의 굴절률이 더 높았고 가시광선 영역에서 80% 이상의 투과율을 나타냄을 알 수 있었다. 티타니아 졸 상태에서는 입자 크기가 나노 크기를 나타냈으며 분말로 소성 후 마이크론 크기로 증가함을 알 수 있었다. 티타늄 박막들은 400$^{\circ}$C에서 무정형에서 anatase로 상전이가 일어나고 700$^{\circ}C$에서는 rutile로 변화됨을 XRD로 관찰하였다. 박막의 결정형태와 모양 및 크기도 SEM과 XRD로 측정하였다. 또한 분말의 물성 및 구조를 SEM, XRD, TGA 그리고 DSC로 알아보았고, 박막의 광학적 특성에 대해서는 ellipsometer로 굴절률과 막두께를 측정하여 비교하여 보았다.

Keywords

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