Journal of the Korean Ceramic Society (한국세라믹학회지)

The Korean Ceramic Society (한국세라믹학회)
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The Simulation of Si quantum Dot Formation in PVD Process

PVD 공정을 이용한 Si 양자점 형성 전산모사

  • 김윤성 (한양대학교 세라믹공학과) ;
  • 정용재 (한양대학교 세라믹공학과)
  • Published : 2002.01.01
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Abstract

In this study, the effect of the processing parameters in PVD process on the size and the distribution of deposited Si quantum dots was quantitatively investigated by computational simulation utilizing Monte Carlo method. The processing parameters, substrate temperature, deposition time, gas pressure and target-substrate distance were selected as variables since those parameters are often selected as variables in PVD experiments. It is predicted that the density of $1{\times}10^{12}cm^{-2}$ Si quantum dots can be deposited on the substrate when the deposition rate is 0.05 nm/sec at the substrate temperature of 490${\circ}$, deposition time of 7 sec, gas pressure of 3 mTorr and target-substrate distance of 8 cm.

본 연구에서는 PVD 공정으로 Si 양자점 형성시 증착조건의 변화가 증착된 양자점 크기와 분포에 미치는 영향을 Monte Carlo법을 응용한 전산모사를 통하여 정량적으로 분석하였다. 전산모사시 PVD 공정에서 일반적으로 제어가 가능한 기판온도, 증착시간, 가스압력과 타겟-기판거리를 공정변수로 선택하였다. 계산 겨로가 증착속도가 0.05 nm/sec이고 기판온도 490${\circ}$, 증착시간 7 sec, 가스압력 3 mTorr, 타겟-기판거리가 8 cm일때 증착 밀도가 $1{\times}10^{12}cm^{-2}$인 Si 양자점 형성이 가능할 것으로 예측되었다.

Keywords

References

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