Journal of Industrial Technology (산업기술연구)

Kangwon National University, Institute of Industrial Technology (강원대학교 산업기술연구소)
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Development of Differential Exhaust Flow Controller using One Chip Microcontroller

단일칩 마이크로컨트롤러를 이용한 차압식 유량제어기의 개발

  • 박찬원 (강원대학교 전기전자정보통신공학부) ;
  • 김현식 (강원대학교 전기공학과 대학원) ;
  • 주용규 (강원대학교 전기공학과 대학원)
  • Published : 2002.06.30
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Abstract

In this paper, a Exhaust Flow Controller (EFC) technology for uniform application of film coater and developer device is introduced that spread and remove photo resister at semiconductor manufacturing process. Because developed EFC device uses differential pressure sensing method as a differential flow meter and embodied smart A/D conversion by using a one chip microprocessor and devised by feedback Servo control, It has shown excellent performance and stability evaluation, as maximum 2000L/min flow, capability of installation to actual semiconductor equipment.

Keywords