한국정밀공학회지 (Journal of the Korean Society for Precision Engineering)

  • 제20권1호
  • /
  • Pages.240-247
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  • 2003
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  • 1225-9071(pISSN)
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  • 2287-8769(eISSN)
한국정밀공학회 (Korean Society for Precision Engineering)
권호 표지

FDTS와 OTS SAM의 어닐링 온도에 따른 트라이볼로지 특성

Tribological Characteristics of FDTS & OTS SAM according to Annealing Temperature

  • 양지철 (연세대학교 기계공학과 대학원) ;
  • 김대은 (연세대학교 기계공학부)
  • 발행 : 2003.01.01
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초록

The tribological characteristics of FDTS (1H, 1H, 2H, 2H-Perflurodecyltrichlorosilane) SAM (self-assembled monolayer) and OTS (octadecyltrichlorosilane) SAM treated by high temperature annealing have been investigated from the viewpoint of stiction, adhesion and friction in micro/nano scale. From the experimental results, it was found that OTS SAM gets destroyed at 20$0^{\circ}C$ and stiction, adhesion and friction coefficient increased, but FDTS SAM was stable up to 40$0^{\circ}C$. Also, it was found that the friction coefficient of normal OTS SAM below 20$0^{\circ}C$ is lower than that of FDTS SAM in micro/nano scale, but stiction and adhesion is vice versa. This work shows the importance of surface group of self-assembled monolayer in dictating the tribological characteristics and thermal stability.

키워드

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