Journal of the Korean Society for Precision Engineering (한국정밀공학회지)

Korean Society for Precision Engineering (한국정밀공학회)
권호 표지

3-Dimensional Modeling and Sensitivity Analysis for Vibration Reduction of the Spin-Coater System

스핀 코터 시스템의 진동 저감을 위한 3차원 모델링과 민감도 해석

  • Published : 2003.02.01
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Abstract

In this paper, the dynamic system modeling and the state sensitivity analysis of the spin-coater system are proposed for the reduction of the vibration. In the respect of modeling, the spin-coater system is considered to be composed of servomotor, spindle, supporting base and so on. Each component of model is combined and derived to 3 dimensional equations. The combined model is verified by experimental values of actual system in the frequency domain. By direct differentiation of the constraint equations with respect to kinematic design variables, such as eccentricity of spindle, moment of inertia, rotational stiffness and damping of supported base, sensitivity equations are derived to the verified state equations. Sensitivity of design variables could be used for vibration reduction and natural frequency shift in the frequency domain. Finally, dominant design variables are selected from the sensitivity analysis.

Keywords

References

  1. ABD Alla El-Marhomy, 'Effect of various rotor-bearing system parameters on the whirl stability of system rotational modes of motion,' Energy Conversion and Management, Vol. 38, No. 1, pp. 73-82, 1997 https://doi.org/10.1016/0196-8904(96)00017-9
  2. Chivens, D. R. and Nelson, H. D., 'The natural frequencies and critical speeds of a rotating flexible shaft-disk system,' ASME Journal of Engineering for Industry, Vol. 97, pp. 881-886, 1996 https://doi.org/10.1115/1.3438696
  3. Degener, M., Hodges, D. H., and Petersen, D., 'Analytical and experimental study of beam torisional stiffness with large axial elongation,' ASME Journal of Applied Mechanics, Vol. 55, pp. 171-178, 1988 https://doi.org/10.1115/1.3173624
  4. Genta, G. and Tonoli, A., 'A harmonic finite element for the analysis of flexural, torsional and axial rotor-dynamic behaviour of discs,' Journal of Sound and Vibration, Vol. 207, No. 5, pp. 693-720, 1997 https://doi.org/10.1006/jsvi.1997.1147
  5. Genta, G., Delprete, C, and Busa, E., 'Some considerations on the basic assumptions in rotordynamics,' Journal of Sound and Vibration, Vol. 227, No. 3, pp. 611-645, 1999 https://doi.org/10.1006/jsvi.1999.2354
  6. Holm-Hansen, B. T. and Gao, R. X., 'Vibration analysis of a sensor-integrated ball bearing,' ASME Journal of Vibration and Acoustics, Vol. 122, 2000 https://doi.org/10.1115/1.1285943
  7. Jang, J. H. and Han, C. S., 'The sensitivity analysis of yaw rate for a front wheel steering vehicle: In the frequency domain,' KSME International Journal, Vol. 11, No. 1, pp. 56-66, 1997 https://doi.org/10.1007/BF02945226
  8. Jang, J. H. and Han, C. S., 'The state sensitivity analysis of the front wheel steering vehicle: In the time domain,' KSME International Journal, Vol. 11, No. 6, pp. 595-604, 1997 https://doi.org/10.1007/BF02946329
  9. Jun, O. S., 'Study of analysis method of general rotor,' KSME Summer Conference Proceeding, Dynamics, and Control, pp. 162-167, 2000
  10. Parker, R. G. and Jr. Mote, C. J., 'Vibration and coupling phenomena in asymmetric disk-spindle systems,' ASME Journal of Applied Mechanics, Vol. 63, pp. 953-961, 1996 https://doi.org/10.1115/1.2787252
  11. 권태종, 채호철, 한창수, 정진태, 안상호, '스핀 코터 성능 향상을 위한 모델링 및 민감도 해석,' 한국공작기계학회지, 제9권, 제6호, pp. 96-102, 2000
  12. Ryu, I. C, 'A Study on 3-dimensional modeling and sensitivity analysis for vibration reduction of the spin-coater system,' Department of Precision Mechanical Engineering, Graduate School of Hanyang Univ. pp. 5-12,2001
  13. Deif, A. S. 'Sensitivity analysis in linear system,' Springer -Verlag, Berlin, Heidelberg
  14. Genta, G., 'Vibration of structures and machines: practical aspects,' Springer -Verlag, New York, 1995
  15. Kuo, B. C, 'Automatic control systems-seventh edition,' Prentice-Hall, Inc., pp. 226-281, 1995