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Anode Characteristics of Tin Oxide Thin Films According to Various Si Additions for Lithium Secondary Microbattery

Si 첨가에 따른 리튬 이차 박막 전지용 주석 산화물 박막의 음극 특성

  • 박건태 (부산대학교 무기재료공학과) ;
  • 박철호 (부산대학교 무기재료공학과) ;
  • 손영국 (부산대학교 무기재료공학과)
  • Published : 2003.01.01

Abstract

For lithium secondary microbattery anode, the tin oxide thin films with Si addition (0, 2, 6, 10, 20 ㏖%) were prepared with R.F. magnetron sputtering at substrate temperature of 30$0^{\circ}C$ and Ar:O$_2$=7:3 atmosphere. As Si addition amount increased, Si-O bonding density increased and Sn-O bonding density decreased. The addition of optimum Si amount led the decrease of Sn oxidation state so that the irreversible capacity reduced and cycle characteristic enhanced during charge-discharge test. SnO$_2$films with 6 ㏖% Si had the highest reversible capacity of 700 mAh/g after 100 cycles.

리튬이차 박막전지로서, 실리콘 첨가(0, 2, 6, 10, 20㏖%)에 따른 주석 산화물 박막을 기판온도 30$0^{\circ}C$, Ar:O$_2$=7:3으로 R.F. magnetron sputtering법으로 제조하였다. 실리콘의 함량이 증가함에 따라, Si-O 결합량이 증가하고 Sn-O 결합량은 감소하였다. 적정량의 실리콘 첨가는 주석의 산화상태를 감소시켜 비가역성을 줄이고 충방전 동안 주석의 부피변화를 막아 사이클 특성이 향상되는 결과를 보여주었다. 6㏖% Si를 첨가한 주석 산화물 박막은 100사이클동안 700mAh/g의 용량을 가지는 가장 좋은 사이클 특성을 나타내었다.

Keywords

References

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