Journal of the Korean Ceramic Society (한국세라믹학회지)

The Korean Ceramic Society (한국세라믹학회)
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Effect of the Introduction of UV Irradiation on Crystallization of Sr0.9Bi2.1Ta2O9 Thin Films by Sol-gel Method

UV노광 공정 도입이 Sol-gel 법으로 제조된 Sr0.9Bi2.1Ta2O9박막의 결정화에 미치는 영향

  • 최병옥 (고려대학교 재료공학과) ;
  • 김병호 (고려대학교 재료공학과)
  • Published : 2003.02.01
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Abstract

$Sr_{0.9}Bi_{2.1}Ta_2O_9$thin films were deposited on $IrO_2$ electrode by spin coating method using photosensitive sol-gel solution. To ensure the UV-exposure effect on SBT thin films, UV irradiated films and non-UV irradiated films were analyzed by XRD, SEM. As a result, UV-irradiation on SBT thin films promoted grain growth of SBT compared with no UV irradiation. In case of the UV irradiated films annealed at$740{\circ}C$for 1 h in an oxygen ambient, the 2Pr value and Pr/Ps at${pm}5$V were$11.48{mu}C/cm^2$and 0.53, respectively. 2Pr values of the UV irradiated SBT thin films at$660-740{circ}C were approximately 12% higher than those of non-UV irradiated thin films.

광감응성 sol-gel 용액을 사용하여 spin coating법으로 $IrO_2$전극 위에 $Sr_{0.9}$$Bi_{2.1}$$Ta_2$$O_{9}$ 박막을 성막하였다. UV 노광이 SBT 박막에 어떤 영향을 미치는지 알아보기 위해 UV 노광을 한 시편과 하지 않은 시편을 XRD 및 SEM로 분석한 결과 UV 노광이 SBT 결정성장을 촉진함을 확인할 수 있었다. UV 노광을 하고 $740^{\circ}C$ 산소분위기에서 1시간 로열처리 한 SBT 박막의 경우 2Pr 값은 5V 인가전압하에서 11.48$\mu$C/$ extrm{cm}^2$, Pr/Ps 값은 0.53이었고 660-$740^{\circ}C$에서 UV 노광을 하지 않은 시편에 비해 UV 노광을 한 시편들에서 약 12% 높은 2Pr 값을 얻었다.

Keywords

References

  1. Mat. Res. Soc. Symp. Proc. v.433 Integration Aspects and Electrical Properties of $SrBi_2Ta_2O_9$ for Non-volatile Memory Applications D. J. Taylor;R. E. Jones;Y. T. Lii;P. Zurcher;P. Y. Chu;S. J. Gillespie
  2. Nature v.374 Fatigue-free Ferroelectric Capacitors with Platinum Electrodes C. A. Paz de Araujo;J. D. Cuchiaro;L. D. McMillan;M. C. Scott;J. F. Scott https://doi.org/10.1038/374627a0
  3. Intergrated Ferroelectrics v.14 New Low Temperature Processing of Sol-gel $SrBi_2Ta_2O_9$ Thin Films Y. Ito;M. Ushikubo;S. Yokoyama;H. Matsumaga https://doi.org/10.1080/10584589708019984
  4. J. Kor. Ceram. Soc. v.37 Dielectric and Electrical Properties of $Sr_{0.9}Bi_{2.1}Ta_2O_9$ Thin Films on $IrO_2$ Electrode B. M. Park;S. P. Song;B. J. Jeong;B. H. Kim
  5. Jpn. J. Appl. Phy. v.36 Preparation and Basix Properties of $SrBi_2Ta_2O_9$ Films Y. Oishi;Y. Matsumuro;M. Okuyama
  6. Intergrated Ferroelectrics v.15 A Critical Comparative Review of PZT and SBT-based Science and Technology for Non-volatile Ferroelectric Memories O. Auciello https://doi.org/10.1080/10584589708015712
  7. J. of Mater. Sci. v.10 Direct Fine-patterning of PZT Thin Films Using Photosensitive Gel Films Derived from Chemically Modified Metal-alkoxides N. Tohge;Y. Takama
  8. J. Kor. Ceram. Soc. v.37 A Study on Fabrication of Photosensitive $Sr_{0.9}Bi_{2.1}Ta_2O_9$ Thin Film by Sol-gel Self-patterning Technique K. H. Yang;Y. H. Park;T. Y. Lim;K. H. Auh;B. H. Kim https://doi.org/10.4191/KCERS.2002.39.8.750
  9. Jpn. J. Appl. Phy. v.40 Preparation and Properties of $SrBi_2Ta_2O_9$ Ferroelectric Thin Films Using Excimer UV Irradiation and Seed Layer T. Hayashi;D. Togawa https://doi.org/10.1143/JJAP.40.5585
  10. J. Mater. Lett. v.52 Novel Chemical Processing for Crystallization of $SrBi_2Ta_2O_9$ Thin Films via UV Irradiation K. Nichizawa;T. Miki;K. Suzuki;K. Kato https://doi.org/10.1016/S0167-577X(01)00358-5
  11. J. Chem. Soc. v.83 Metal β-diketone Complexes. Part 1. Metal-carbon Bonding in Some Platinum Acetylacetonates J. Lewis;R. F. Long;C. Oldham https://doi.org/10.1021/ja01466a014
  12. J. Jpn. Ceram. Soc. v.97 Preparation of Amorphous $Al_2O_3$ Thin Films from Stabilized Al-alkoxides by the Sol-gel Method H. Uchihashi;N. Tohge;T. Minami https://doi.org/10.2109/jcersj.97.396