나노입자 및 미세가공기술 응용

Nanoparticles and It's Applications in Micromachining

  • 김용진 (한국기계연구원 환경기계연구부)
  • 발행 : 2003.03.01

초록

키워드

참고문헌

  1. Roco, M. C., 'Nanoparticles and nanotechnology research,' Journal of Nanoparticle Research 1: pp. 1-6, 1999 https://doi.org/10.1023/A:1010093308079
  2. Roco, M. C., Bai, C. L., Fissan, H. J., Schoonman, J., Hayashi, C. & Oda, M. 'Review of National Research Programs in nanoparticle and nanotechnology research,' J. Aerosol Science, Vol. 29,(5/6),pp. 749-760, 1998 https://doi.org/10.1016/S0021-8502(97)10036-2
  3. Kuga, Y., Hirasawa, M., Seto, T., Okuyama, K. & Takeuchi, K., 'In situ observation of UF5 nanoparticle growth in a lowpressure mixed-flow reactor,' Appl. Phys., A 68,pp. 75-80, 1999 https://doi.org/10.1007/s003390050856
  4. Takeuchi, K., Kuga, Y., Satooka, S. & Okuyama, K. 'Growth of UF5 nanoparticles formed by laseer photolysis in a supersonic nozzle,' J. Aerosol Sci., 29, pp. 1027-1033, 1998 https://doi.org/10.1016/S0021-8502(98)00003-2
  5. Siegel, R., Hu, E., Cox, D. M., Goronkin, H., Jelinski, L., Koch, C. C., Mendel, J., Roco, M. C. & Shaw, D. T., 'Nanostructurescience and technology: Research and development status and trends in nanoparticles, nanostructured materials, and nanodevices,' WTEC editor: G. M. Holdridge, Kluwer Academic Publishers, NL, pp. 336, 1999
  6. Hiroshi Fundouzi, Mikihiko Kobayashi and Norio Shinya, 'Assembling 100nm scale particles by an electrostatic potential field,' Journal of Nanoparticle Research 3:pp. 193-200, 2001 https://doi.org/10.1023/A:1017903123384
  7. Juntao Xu, Changgong Zhou, Sheila Grant, Edward Nadgorny, and Jaroslaw Drelich, 'Laser Guidance Deposition Technique for Patterning Microstructures Made of Nanoparticles with Varying Surface Functionality,' Mat. Res. Soc. Symp. Proc., Vol. 728, 2002