Development of precision Moving Mechanism using Ellipsoidal Motion of piezoelectric Bimorph

압전 바이모프의 타원운동을 이용한 정밀 이동기구 개발

  • 박한길 (KAIST 대학원 기계공학과 MSD 실험실) ;
  • 김준형 (KAIST 대학원 기계공학과 MSD 실험실) ;
  • 김수현 (KAIST 대학원 기계공학과) ;
  • 곽윤근 (KAIST 대학원 기계공학과)
  • Published : 2003.04.01

Abstract

A new type of precision actuator is developed using piezoelectric bimorphs. This type of actuator is applicable for the flat surface or in-pipe system and can make forward and backward motion. Two bimorphs are linked serially and two different phased voltages are applied to each bimorph. Therefore, The end of the bimorph makes ellipsoidal motion. The device moves by the friction force between the rubber attached at the bimorph end and the inner surface of the pipe. As the results, the driving range of the device is about 0~18Hz and the device guarantees very high linearity at low frequency, 0~1 Hz. The maximum velocity of the device is about 6mm/s at 10Hz. The developed mechanism is very simple and use piezoelectric bimorph. So, it is possible to miniaturize and educe the power consumption.

Keywords

References

  1. Ishihara, H., Arai, F. and Fukuda, T., 'Micro Mechatronics and Micro Actuators,' IEEE/ASME Trans. on Mechatronics, Vol. 1, No.1, pp. 68-79, March 1996 https://doi.org/10.1109/3516.491411
  2. Ambroggi, F., Fortuna, L. and Muscato, G., 'PLIF: Piezo Light Intelligent Flea New Micro-Robots Controlled By Self-Learning Techniques,' Proceedings of the 1997 IEEE International Conference on Robotics and Automation, ICRA. Part 2,pp.1767-1772,1997 https://doi.org/10.1109/ROBOT.1997.614407
  3. Okabe, H. and Kanno, M., 'Linear Motor Using Hysteresis and Resonance of Piezoelectric Element,' Proceedings of the 1998 11 th IEEE International Symposium on Applications of Ferroelectrics, pp. 365-367, 1998 https://doi.org/10.1109/ISAF.1998.786709
  4. Kawakita, S., Isogai, T., Ohya, N. and Kawahara, N., 'Multi-Layered Piezoelectric Bimorph Actuator,' International Symposium on Micromechatronics and Automation, pp. 73-77,1997 https://doi.org/10.1109/MHS.1997.768860
  5. Smiths, J. G. and Ballato, A., 'Dynamic Admittance Matrix of Piezoelectric Cantilever Bimorphs,' Journal of Microelectromechanical Systems, Vol. 3, No.3, pp. 105-112, 1994 https://doi.org/10.1109/84.311560
  6. 박한길, '압전소자를 이용한 정밀 이동기구 개발,' 한국과학기술원 기계공학과 석사 학위 논문, 2002
  7. 김병준, 김수현, 곽윤근, '압전소자를 이용한 다중빔 광디스크용 빔 회전 구동기,' 한국정밀공학회지, Vol. 17, No.5, pp. 154-160, 2000