A development of fabrication processes of microstructure using SU-8 PR

SU-8 PR을 이용한 마이크로 구조물 제작 공정 개발

  • 김창교 (순천향대학교 정보기술공학부) ;
  • 장석원 (순천향대학교 정보기술공학부) ;
  • 노일호 (순천향대학교 정보기술공학부)
  • Published : 2003.04.01


In this paper, we developed a new thick photoresist fabrication technology for 3-dimensional microstructures. In general, like as AZ photoresist was coated with thin film thickness about 1 $\mu\textrm{m}$ to 30 $\mu\textrm{m}$, but photoresist like SU-8 has thickness of several tens $\mu\textrm{m}$ or more and high aspect ratio. When we fabricate a microstructure using the thick photoresist like SU-8, cracks on the SU-8 thick photoresist are appeared by stress which was caused by sudden cooling down during bake of the thick photoresist spun on wafer. Thus, it was hard to fabricate the microstructure using the thick photoresist for electroplating. In this paper, we developed a new process to produce a 3-dimensional microstructure without the crack by stress through a suitable thick photoresist coating, time control of cool down and time control of PEB (Post Expose Bake).


  1. Journal of MEMS v.9 A Universal Electrogagnetic Microacutuator Using Magnetic Interconnection Concepts Daniel J. Sadler;trifon M. Liakopoulos;Chaon H. Ahn
  2. Opimization of Fabrication Process for High Aspect Ratio Metallica Comb Acuator Using UV LIGA Process Jang Hyun Ki
  3. Proc. Solid-Sate Sensors and Acuators Workshop 5-Level Polysilicon Surface Micromachine Technology : Application to COmplex Mechani cal System M. Steven Roger;Jeffry J. Sniegowski
  4. Proc. the I IEEE 86 High Aspect Ratio Mocromachinin g Via Deep X-Ray Lithographyu H. Guckel
  5. IBM Journal of Research & Development v.41 Negative Photoresists for Optical Lithography J.M. Shaw;J.D. Galore;N.C. Bionic;W.E. Coney;S.J. Holmes