Korean Journal of Optics and Photonics (한국광학회지)

Optical Society of Korea (한국광학회)
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Transport and optical properties of indium tin oxide films fabricated by reactive magnetron sputtering

제작 온도 및 산소 분압에 의존하는 인듐 주석 산화물의 전기적, 광학적 성질

  • Published : 2003.06.01
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Abstract

Indium tin oxide (ITO) thin films (170 nm) were grown by DC magnetron sputtering deposition on Coming glass substrates without a post annealing. The electrical transport and optical properties of the films have been investigated as a function of deposition temperature $T_{s}$ (10$0^{\circ}C$$\leq$ $T_{s}$$\leq$35$0^{\circ}C$) and oxygen partial pressure $P_{o_{2}}$, (0 $P_{o_{2}}$ $\leq$ 10$^{-5}$ torr). Films were deposited from a high density (99% of theoretical density) ITO target (I $n_2$ $O_3$: Sn $O_2$= 90 wt% : 10 wt%) made of ITO nano powders. With an increase of $T_{s}$ the electrical resistivity p of ITO thin films was found to decrease, but the mobility $\mu$$_{H}$ was found to increase. The carrier density nu shows the maximum value of 6.6$\times$10$^{20}$ /㎤ at $T_{s}$ = 30$0^{\circ}C$. At fixed Is, with an increase of the oxygen partial pressure, $n_{H}$ and $\mu$$_{H}$ were found to decrease, but p was found to increase. The minimum resistivity and maximum mobility values of the ITO films were found to be 0.3 mΩ.cm and 39.3 $\textrm{cm}^2$/V.s, respectively. The visible transmittance of the ITO films was above 80%.. 80%..

자체 제작한 고밀도(이론 밀도의 99%) ITO(I $n_2$ $O_3$:Sn $O_2$=90 wt%) 타깃과 직류 마그네트론 스퍼터링 방법을 이용하여 산소분압 $P_{o_{2}}$ (0 $P_{o_{2}}$ $\leq$$10^{-5}$ torr)와 성장 온도 Ts(10$0^{\circ}C$ $T_{s}$$\leq$35$0^{\circ}C$)를 변화시키면서 ITO 박막을 제작하고 전기적, 광학적 특성을 조사하였다. ITO박막의 비저항은 제작 온도가 증가함에 따라 감소하다가 $T_{s}$=30$0^{\circ}C$일 때 최저 비저항값 0.30 mΩ.cm를 나타내었고 $T_{s}$>30$0^{\circ}C$ 이상에서는 약간 증가하였다. $T_{s}$=30$0^{\circ}C$에서 제작한 ITO 박막의 최대 전하 농도는 6.6$\times$$10^{20}$ /㎤이었다. $T_{s}$를 고정하고 ITO 박막 제작 시 사용한 산소분압이 증가함에 따라 전하농도, 전하유동도는 급격하게 감소하여 비저항이 크게 증가하는 것으로 나타났다 ITO박막의 최저 비저항과 최대 전하 유동도는 각각 0.3 mΩ.cm와 39.3 $\textrm{cm}^2$/V.s였다. 또한 가시광 영역 (400~700 nm)에서 ITO박막의 광투과도는 80~90%로 높게 나타났다.나타났다.

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References

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