Journal of the Korean Ceramic Society (한국세라믹학회지)

The Korean Ceramic Society (한국세라믹학회)
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Annealing Temperature Dependence on Anodizing Properties of ZrO2/Al Films Prepared by Sol-gel Method

졸-겔법으로 제조된 ZrO2/Al막의 열처리 온도에 따른 양극산화 특성

  • 박상식 (상주대학교 신소재공학과) ;
  • 이병택 (공주대학교 신소재공학과)
  • Published : 2003.09.01
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Abstract

Anodic oxide films on aluminum play an important role as a dielectrics in aluminum electrolytic capacitor. In order to obtain the high capacitance, ZrO$_2$ films were coated on aluminum foils by sol-gel method and then, the properties of anodized films were studied. The coating and drying of the films were repeated 4-10 times and annealed at 300～$600^{\circ}C$ and the triple layer of ZrO$_2$/Al-ZrO$_{x}$ /Al$_2$O$_3$ was formed onto aluminum substrates after anodizing of ZrO$_2$/Al film. The thickness of $Al_2$O$_3$ layer was decreased with increasing the annealing temperature due to the densification of ZrO$_2$ film. The ZrO$_2$ films were crystallized even at 30$0^{\circ}C$ and showed nanocrystalline structure. The. capacitance of aluminum foil annealed at low temperature was higher than that at high temperature. The increase of capacitance was due to the high capacitance of ZrO$_2$ film annealed at low temperature. The capacitance of ZrO$_2$ coated aluminum increased about 3 times compared to that without a ZrO$_2$ layer after anodizing to 400 V. From these results, the aluminum foils with composite oxide layers are found to be applicable to the aluminum electrolytic capacitor.

알루미늄 전해캐패시터에서 양극산화막은 유전체로서 중요한 역할을 하는데 높은 캐패시턴스를 얻기 위하여 알루미늄 위에 ZrO$_2$ 막을 졸-겔법으로 코팅하고 양극산화시킨 후 이들이 특성을 연구하였다. 코팅과 건조를 4～10회 반복하여 제조된 막들을 300～$600^{\circ}C$에서 열처리하였으며 ZrO$_2$/Al 막을 양극산화 시킨 후 ZrO$_2$/Al-ZrO$_{x}$ /Al$_2$O$_3$의 세층이 알루미늄 기판 위에 형성되었고, $Al_2$O$_3$ 층의 두께는 열처리 온도가 증가함에 따라 ZrO$_2$ 막의 치밀화로 인해 감소하였다. ZrO$_2$ 막은 30$0^{\circ}C$에서도 미세한 결정질 구조를 가지고 성장하였으며, 열처리와 양극산화 후 나타나는 알루미늄박의 캐패시턴스는 저온에서 열처리한 박이 큰 값을 보이는데 이는 ZrO$_2$ 막 자체의 캐패시턴스가 큰 것이 기인한다. 400V로 양극산화한 후 ZrO 막을 코팅한 알루미늄박의 캐패시턴스는 코팅하지 않은 경우 보다 약 3배 정도의 큰 값을 보여 복합산화물층을 갖는 알루미늄박은 알루미늄 전해캐패시터에의 적용가능성을 보였다.

Keywords

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