The National Technology Roadmap of Nano-scale Processing and Equipments

초미세 공정 및 장비 기술의 국가 기술 로드맵

  • 이응숙 (한국기계연구원 지능형정밀기계연구부) ;
  • 박철우 (한국산업기술대학교 기계공학과)
  • Published : 2003.12.01

Abstract

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References

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