Korean Journal of Materials Research (한국재료학회지)

Materials Research Society of Korea (한국재료학회)
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Gas Sensing Properties of Nanocrystalline ITO Thick Films with Different Particle Sizes

입자 크기에 따른 ITO 후막 센서의 가스 감지 특성

  • Shin, D.W. (Department of Materials Science and Metallurgy, Kyungpook National University) ;
  • Lee, S.T. (Department of Materials Science and Metallurgy, Kyungpook National University) ;
  • Jun, H.K. (Department of Materials Science and Metallurgy, Kyungpook National University) ;
  • Lee, D.D. (School of Electronic and Electrical, Kyungpook National University) ;
  • Lim, J.O. (Department of Medical and Biomedical Engineering, Kyungpook National University) ;
  • Huh, J.S. (Department of Materials Science and Metallurgy, Kyungpook National University)
  • 신동원 (경북대학교 금속공학과) ;
  • 이상태 (경북대학교 금속공학과) ;
  • 전희권 (경북대학교 금속공학과) ;
  • 이덕동 (경북대학교 전기전자공학부) ;
  • 임정옥 (경북대학교 의용생체공학과) ;
  • 허증수 (경북대학교 금속공학과)
  • Published : 2003.02.01
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Abstract

Nano-sized powders of Indium Tin Oxide(ITO) were synthesized by a coprecipitation method. In order to investigate the gas sensing characteristics in the nanocrystalline ITO thick films with various particle sizes, ITO powders with the average particle diameter of 15, 30, and 70 nm respectively were synthesized. And the sensitivity of ITO thick films was measured upon exposure to a target gas($C_2$$H_{5}$ /OH) and some other Volatile Organic Compounds(VOCs), such as, toluene, methanol, benzene, chloroform. As a result, ITO thick films had high sensitivity for ethanol and higher sensitivity with smaller particle size.

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References

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