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Characteristics of Surface Reaction of SnO2 Thin Films Prepared by MOCVD

MOCVD로 제조한 SnO2 박막의 표면반응 특성

  • Park, Kyung-Hee (Research Institute of Energy Resources Technology, Chosun University) ;
  • Seo, Yong-Jin (Department of Electrical Engineering, Daebul University) ;
  • Hong, Kwang-Jun (Department of Physics, Chosun University) ;
  • Lee, Woo-Sun (Department of Electrical Engineering, Chosun University) ;
  • Park, Jin-Seong (Department of Material Engineering, Chosun University)
  • 박경희 (조선대학교 에너지자원신기술연구소) ;
  • 서용진 (대불대학교 전기공학과) ;
  • 홍광준 (조선대학교 물리학과) ;
  • 이우선 (조선대학교 전기공학과) ;
  • 박진성 (조선대학교 재료공학과)
  • Published : 2003.05.01

Abstract

Tin dioxide($_SnO2$) thin films were deposited on alumina substrate by metal-organic chemical vapor deposition (MOCVD) as a function of temperature and time. Thin films were fabricated from di-n-butyltin diacetate as a precursor and oxygen as an oxidation. The microstructure of deposited films was characterized by X-ray diffraction and field emission scanning electron microscopy(FE-SEM). The thickness was linearly increased with deposition time and $SnO_2$structure was found from $375^{\circ}C$ for the deposition time of 32 min. The maximum sensitivity to 500ppm CO gas was observed for the specimens deposited at $375^{\circ}C$ for 2 min at the operating temperature of $350^{\circ}C$. Gas sensitivity to CO increased with decreasing the film thickness. The sensing properties of response time, recovery and sensitivity of CO were changed with variations of substrate temperature and time.

Keywords

References

  1. J. Bruneaux, H. Cachet, M. Froment and A. Messad, Electrochemica Acta, 39(8/9), 1251 (1994) https://doi.org/10.1016/0013-4686(94)E0044-Z
  2. S. C. Lee, J. H. Lee, T. S. Oh and Y. H. Kim, Solar Energy Materials and Solar Cells, 75(3/4), 481 (2003) https://doi.org/10.1016/S0927-0248(02)00201-5
  3. W. M .Sears and M. A. Gee, Thin Solid Films, 165, 265 (1988) https://doi.org/10.1016/0040-6090(88)90698-0
  4. M. C. Horrillo, P. Serrini, J. Santos and L. Manes, Sens. Actuators B, 45, 193 (1997) https://doi.org/10.1016/S0925-4005(97)00293-1
  5. S. W. Lee, P. P. Tsai and H. Chen, Sens. Actuators B, 41, 55 (1997) https://doi.org/10.1016/S0925-4005(97)80277-8
  6. G. Sberveglieri, G. Faglia, S. Groppelli and P. Nelli,, Transducers '91, 6th Int'l Conf. on Solid-State Sensors and Actuators (San Francisco, CA, June, 1991) p. 165 https://doi.org/10.1109/SENSOR.1991.148829
  7. J. Kane, H. P. Schweizer and W. Kern, J. Electrochem. Soc., 122, 1144 (1975) https://doi.org/10.1149/1.2134412
  8. K. Shoji, Y. Isao, M. Kenji, O. Masayuki, Solid State Ionics, 141-142, 463 (2001) https://doi.org/10.1016/S0167-2738(01)00847-5
  9. H. Windischman and P. Mark, J. Electrochem. Soc., 126(4), 627 (1979) https://doi.org/10.1149/1.2129098