Transactions of the Korean Society of Mechanical Engineers A (대한기계학회논문집A)

The Korean Society of Mechanical Engineers (대한기계학회)
권호 표지
DOI QR코드

DOI QR Code

Structural Analysis and Optimum Design of a De-coupled Vertical Micro-Gyroscope

비연성 수직형 마이크로 자이로스코프의 구조해석 및 최적설계

  • 박성균 (한양대학교 대학원 기계설계학과) ;
  • 정희문 (한양대학교 대학원 기계설계학과) ;
  • 김명훈 (한양대학교 대학원 기계설계학과) ;
  • 김형태 (한양대학교 대학원 기계설계학과) ;
  • 하성규 (한양대학교 기계정보경영공학부)
  • Published : 2003.11.01
Download PDF
⟨ Previous Next ⟩

Abstract

This paper presents the structural analysis and optimum design of a vertical micro-gyroscope with decoupled 2 degrees of freedom (DOF), driven by electrostatic force. Simplified beam models were presented to derive the structural stiffness of the driving spring of the U shape and the sensing spring of I shape. A finite element analysis (FEA) was performed to validate each derivation. A total mass and a polar mass moment of inertia were also obtained and used in calculating the resonance frequency at each mode of the 2 DOF. The resonance frequencies of the total system were calculated using the proposed models and it has been found that they were in excellent agreement with those of the FEA. Finally, the developed analysis program was then linked to an optimum design module, and an optimum design of the micro-gyroscope was successfully performed.

Keywords

References

  1. Juneau, T. N., 1997, 'Micromachined Dual Input Axis Rate Gyroscope,' Ph.D. Dissertation, University of California at Berkeley
  2. Soederkvist, J., 1994, 'Micromachined Gyro-scopes,' Sensors and Actuators A, Vol. 43, pp. 65-71 https://doi.org/10.1016/0924-4247(93)00667-S
  3. Song, H., Oh, Y. S., Song, I. S., Kang, S. J., Choi, S. O., Kim, H. C., Ha, B. J., Baek, S. S., and Song, C. M., 2000, 'Wafer Level Vacuum Packaged De-coupled Vertical Gyroscope by a New Fabrication Process,' The 13th Annual international Conference on Micro Electro Mechanical Systems, pp. 520-524 https://doi.org/10.1109/MEMSYS.2000.838571
  4. Boxenhorn, B. and Greiff, P., 1988, 'A Vibratory Micromechanical Gyroscope,' AIAA Guidance and Control Conference, pp. 1033-1040
  5. Greiff, P., Boxenhorn, B., King, T., and Niles, L., 1991, 'Silicon Monolithic Micromechanical Gyro-scope,' MEMS Proceedings, pp. 966-968 https://doi.org/10.1109/SENSOR.1991.149051
  6. Lee, S. H., 1998, 'A Study of planar vibratory gyroscope using electromagnetic detection,' Ph.D Thesis, Seoul National University, Seoul, Korea
  7. ANSYS, 1994, ANSYS User's Manual (Rev. 5.1), Swanson Analysis Systems, Inc., Houston
  8. Baek, S. S., Oh, Y. S., Ha, B. J., An, S. D., An, B. H., Song, H. and Song, C. M., 1999, 'A Symmetrical z-axis Gyroscope with A High Aspect Ratio using Simple and New Process,' Twelfth IEEE International Conference (MEMS '99), pp. 612-617 https://doi.org/10.1109/MEMSYS.1999.746898
  9. Hibbeler, R. C., 1997, Mechanics of Materials, Prentice Hall, Inc., New Jersey, pp. 255-364, 709-778
  10. Meirovitch, L., 1967, Analytical Methods in Vibrations, John & Sons, Inc., New York, pp. 128-135
  11. Pilkey, W. D., 1994, Formulars for Stress, Strain, and Structural Matrices, John & Sons, Inc., New York, pp. 56, 1324-1328
  12. Meriam, J. L. and Kraige, L. G., 1993, Engineering Mechanics Volume 2 Dynamics, 3rd ed., John & Sons, Inc., New York, pp. 657-710
  13. Arora, J. S., 1989, Introduction to Optimum Design, McGraw-Hill, Inc., New York, pp. 20-77
  14. DOT, 1995, DOT User's Manual (Ver. 4.20), Vanderplaats Research & Development, Inc., Colorado