Transactions of the Korean Society of Mechanical Engineers A (대한기계학회논문집A)

The Korean Society of Mechanical Engineers (대한기계학회)
권호 표지
DOI QR코드

DOI QR Code

Feasibility Study of Positioning Device Using Magnetic Suspension System of Out of Plane Direction Forces

면외 방향의 자기력을 이용한 자기 서스펜션 시스템의 위치결정기구로의 적용 가능성

  • 이상헌 (연세대학교 대학원 기계공학과) ;
  • 백윤수 (연세대학교 기계공학부)
  • Published : 2003.11.01
Download PDF
⟨ Previous Next ⟩

Abstract

This paper is about feasibility study of positioning device using magnetic suspension system which uses only vertical magnetic forces. The proposed system has inherited advantages from contact-free system, simple structure, and high expansibility in operating range different from conventional positioning devices. In this paper, the structure and operating principle are described and the linearized magnetic force and dynamic model are obtained. With the linear control theory, the experiments are executed. finally, the experimental results are shown.

Keywords

References

  1. Wang, I. A.,Li, S.H. and Vishniac, I.M., 1991, 'A Magnetic Levitation Transport Path,' IEEE Trans Semiconductor Manufacturing, Vol. 4, No. 2, pp. 145-154 https://doi.org/10.1109/66.79726
  2. JIn, J, Yih, T.C., Higuchi, T., and Jeon, J.P., 1998, 'Direct Electrostatic Levitation and Propulsion of Silicon Wafer,' IEEE Trans. Industry Applications, Vol. 34, No. 5, pp. 975-985 https://doi.org/10.1109/28.720437
  3. Holmes M., Hocken P. and Trumper D., 2000, 'The Long-Range Scanning Stage: a Novel Platform for Scanned-Probe Microscopy,' Precision Engineering, Vol. 24, pp. 191-209 https://doi.org/10.1016/S0141-6359(99)00044-6
  4. Sawyer, B.A., 1974, 'Actuating System,' U.S. Patent 3 857 078
  5. Kim, W.J., Trumper, D, and Jeffrey, H.L., 1998, 'Modeling and Vector Control of Planar Magnetic Levitator,' IEEE Trans. Industry Applications, Vol. 34, No. 6, pp. 1254-1262 https://doi.org/10.1109/28.738999
  6. Jung Kwang Suk and Baek Yoon Su, 2002, 'Study on a Novel Contact-Free Planar Moving System Using Electromagnet and Permanent magnet,' IEEE/ASME Trans. Mechatronics, Vol. 7, No. 1, pp.35-43 https://doi.org/10.1109/3516.990885
  7. Jung Kwang Suk, Lee Sang Heon, and Baek Yoon Su, 2002, 'Feasibility Study of General-purpose Precision Stage Using A Novel Contac-Free Surface Actuator Based on Magnetic Suspension Technology,' Trans. of KSME A, Vol. 26, No. 3, pp. 452-460 https://doi.org/10.3795/KSME-A.2002.26.3.452
  8. Bernard Etkin, 1972, Dynamics of Atmospheric Flight, John Wiley & Sons, Inc., pp. 121-195
  9. Griffiths David J., 1989, Introduction to electrodynamics, Gyo hak sa, Seoul, pp. 227-250
  10. Nasar, S.A., and Unnewehr L.E., 1983, Electromechanics and Electric Machines, John Wiley & Sons, Inc
  11. Lee, S.H., and Baek Y.S., 2003, 'Modeling and Analysis of Electromagnets for Magnetic Suspension System,' Journal of the KSPE, Vol. 20, No. 5, pp. 180-188