Journal of Industrial Technology (산업기술연구)

Kangwon National University, Institute of Industrial Technology (강원대학교 산업기술연구소)
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Experimental Analysis on Particle Growth in TEOS/O2 Plasma Reactor

TEOS/O2용 플라즈마 반응기에서의 미립자 성장에 대한 실험적 분석

  • 홍성택 (강원대학교 화학공학과) ;
  • 김교선 (강원대학교 화학공학과)
  • Published : 2003.08.31
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Abstract

A study on the particle growth in $TEOS/O_2$ plasma was performed by observing the particle size and its morphology by TEM. The qualitative chemical analysis of particles was also determined by the EDS (Energy Dispersive X-Ray Spectrometer). The effects of process variables such as the plasma on-time and bubbler temperature on the particle growth were investigated. The particle size becomes larger as the plasma on-time because of the longer coagulation, and also as the bubbler temperature increases because of the faster coagulation between particles.

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