Fabrication of 3-D Structures by Inclined and Rear-side Exposures

선택적 경사 노광과 후면 노광에 의한 3차원 구조물의 제작

  • 이준섭 (한양대 자연과학대 물리학과) ;
  • 신현준 (한국과학기술연구원) ;
  • 문성욱 (한국과학기술연구원) ;
  • 송석호 (한양대 자연과학대 물리학과) ;
  • 김태엽 (한국과학기술연구원)
  • Published : 2004.01.01


3D microstructures with different side-wall angles and different scales are fabricated by both methods of inclined exposure and rear-side exposure at each of selected areas on a same substrate. Conventional methods of inclined exposure are used to make side-walls with a same inclined angle on one substrate and to get a scale error due to front-side exposure through thick photoresist layer, But, by using the proposed method, we are able to fabricate 3D microstructures on a same substrate with various side-wall angles and accurate dimensions as the original design. In the rear-side exposure, UV exposure light reflects from the chromium mask pattern after passing through the thick photoresist layer, resulting in fabrication of well-defined, inclined 3D structures inside the thick photoresist layer.


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