Transactions of the Korean Society of Mechanical Engineers B (대한기계학회논문집B)

The Korean Society of Mechanical Engineers (대한기계학회)
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A Study on Effect of Spray Characteristics on Etching Characteristics in Micro Fabrication System

미세 가공 시스템에서 분무특성이 에칭특성에 미치는 영향에 관한 연구

  • 정지원 (부산대학교 기계기술연구소) ;
  • 김덕줄 (부산대학교 기계공학부)
  • Published : 2004.01.01
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Abstract

The objective of this study is to investigate the effect of the spray characteristics on the etching characteristics for the optimization of etching process in the micro fabrication industry. The etching characteristics such as etching rate and etching factor were investigated under different etching conditions. To compare with the etching characteristic, the spray characteristics such as droplet size and velocity were measured by PDA system. The etching rate was increased in case of high spray pressure and in the region of spray center. The etching factor was increased with decrease in the distance from nozzle tip and increase in the etchant temperature. It was found that the spray characteristics were correlated with the etching characteristics.

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References

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