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The Institute of Electronics and Information Engineers (대한전자공학회)
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Nano/MEMS 기술에 기반한 고기능 관성 센서

  • Published : 2004.01.01
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Abstract

Keywords

References

  1. International Electron Device Meeting Integrated Sensor and Electronics Processing For >10^8 iMEMS Inertial Measurement Unit Components S.Lewis;S.Alie;Dr.T.Brosnihan;C.Core;T.Core;Dr.R.Howe;J.Geen;D.Hollocher;Dr.M.Judy;J.Memishian;K.Nunan;Dr.R.Payne;S.Sherman;B.Tsang;B.Wachtmann
  2. IEEE/ASME Journal of Microelectromechanical Systems v.9 no.4 Surface/Bulk micromachined single-crystalline silicon micro-gyroscope Lee,S.;Park,S.;Kim,J.;Yi,S.;Cho,D.
  3. Proceedings of Transduces 2003:12th International Conference on Solid State Sensors and Actuators Robust SOI Process without Footing for Ultra High-Performance Microgyroscopes J.Kim;S.Park;D.Kwak;H.Ko;D.Cho;Charr,W.;Buss,J.;Cho,D.
  4. 제11회 한국반도체학술대회 Sacrificial Bulk Micromachined high performance z-axis microgyroscope T.Song;S.Park;D.Kwak;H.Ko;D.Cho
  5. Proceedings of Transducers 2003:12th International Conference on Solid State Sensors and Actuators Micromechanical Triaxial Acceleration Sensor for Automotive Applications Ralf Reiehenbach;Dietrich Schubert;Gerald Gerlach
  6. Proceedings of Transduces 2003:12th International Conference on Solid State Sensors and Actuators A Monolithic Three-axis Silicon Capacitive Accelerometer with micro-g Resolution J.Chae;H.Kulah;K.Najafi
  7. International Conference on Materials for Advanced Technologies A Novel Z-axis Accelerometer with Perfectily Aligned Vertical Combs Fabricated Using the Extended Sacrificial Bulk Micromachining Process H.Ko;J.Kim;S.Park;D.Kwak;D.Cho
  8. Tech. Dig. 12th IEEE International Conference on Microelectromechanical Systems A micromachined vibrating rate gyroscope with independnet beams for the drive and detection modes Y.Mochida;M.Tamura;K.Ohwada
  9. Proceedings of the 2001 IEEE International Conference on robotice & Automation A de-coupled vibratory gyroscope using a mixed micro-machining technology B.Lee;S.Lee;K.Jung;J.Choi;T.Chung;Y.Cho
  10. IEEE International Conference on Microelectromechanical Systems Extended Sacrifical Bulk Micromachining Process and Its Application to the Fabrication of X-axis Single-crystalline Silicon Micro-gyroscope J.Kim;S.Park;D.Kwak;H.Ko;D.Cho