The Flow Analysis and Evaluation of the Peristaltic Micropump

마이크로 정량펌프의 유동해석과 작동성능 평가

  • 박대섭 (강원대학교 기계·메카트로닉스공학부 대학원) ;
  • 최종필 (강원대학교 기계·메카트로닉스공학부 대학원) ;
  • 김병희 (강원대학교 기계·메카트로닉스공학부) ;
  • 장인배 (강원대학교 기계·메카트로닉스공학부) ;
  • 김헌영 (강원대학교 기계·메카트로닉스공학부)
  • Published : 2004.02.01

Abstract

This paper presents the fabrication and evaluation of mechanical behavior for a peristaltic micropump by flow simulation. The valve-less micropump using the diffuser/nozzle is consists of the lower plate, the middle plate, the upper plate and the tube that connects inlet and outlet of the pump. The lower plate includes the channel and the chamber, and the plain middle plate are made of glass and actuated by the piezoelectric translator. Channels and a chamber on the lower plate are fabricated on high processability silicon wafer by the DRIE(Deep Reactive Ion Etching) process. The upper plate does the roll of a pump cover and has inlet/outlet/electric holes. Three plates are laminated by the aligner and bonded by the anodic bonding process. Flow simulation is performed using error-reduced finite volume method (FVM). As results of the flow simulation and experiments, the single chamber pump has severe flow problems, such as a backflow and large fluctuation of a flow rate. It is proved that the double-chamber micropump proposed in this paper can reduce the drawback of the single-chamber one.

References

  1. 김영수, 양상식, '실리콘 박막을 이용한 마이크로펌프의 제작 및 성능시험,' 대한전기학회 논문지, 제 46 권, 제 7 호, pp. 1135-1140, 1997
  2. Stemme, E. and Stemme, G., 'A Valve-less Diffuser/Nozzle based Fluid Pump,' Sensors and Actuators, Vol. A39, pp. 159-167, 1993 https://doi.org/10.1016/0924-4247(93)80213-Z
  3. Stemme, E. and Stemme, G. , 'A Valve-less Fluid Pump,' Swedish Patent Appl. No. 9300, 604-607, 1993
  4. Kim, B. H., Chang, I. B. and Kim, H. Y., 'Development of having doule-chamber in micro-bubble pump,' Proceedings of the KSPE Spring Annual Meeting, pp.1186-1190, 2003
  5. Shoji, S. and Esahi, M., 'Microflow devices and systems,' Journal of Micromechanics and Microengineering, Vol. 4, pp. 157-171 https://doi.org/10.1088/0960-1317/4/4/001
  6. Elwenspoek, M., Lammerink, T. S. J., Miyake, R. and Fluitman, J. H. J., 'Towards intergrated microliquid handling systems,' Journal of Micromechanics and Microengineering, Vol. 4, pp. 227-245, 1994 https://doi.org/10.1088/0960-1317/4/4/008
  7. White, F. M., Fluid Mechanics. New York: McGraw-Hill, 1986
  8. Smits, J. G., 'Piezoelectric Micropump with Three Valves Working Peristaltically,' Sensors and Actuators, Vol. A21-A23, pp. 203-206, 1990 https://doi.org/10.1016/0924-4247(90)85039-7
  9. Zengerle, R., Kluge, S., Richter, M. and Richter, A., 'A Bidirectional Silicon Micropump,' presented at IEEE 8th International Workshop on Micro Electro Mechanical Systems (MEMS'95), Amsterdam, the Netherlands, Jan. 29 - Feb. 2, 1995 https://doi.org/10.1016/0924-4247(96)80088-4
  10. Bacher, W., Menz, W. and Schomburg, W. K., 'Micropump manufactured by thermoplastic molding, presentedat IEEE 7th International Workshop on Micro Electro Mechanical Systems (MEMS'94), Oiso, Japan, January 25-28, 1994 https://doi.org/10.1109/MEMSYS.1994.555591
  11. klaassen, E. H., Petersen, K., Noworolski, J. M., Logan, J., Maluf, N. I., Stormetn, C., McCulley, W. and Kovacs, G. T. A., 'Silicon fusionbonding and deep reactive ion etching; a new technology for microstructures,' presented at ansducers'95 - Eurosensor IX, Stockholm, Sweden, June 25-29, 1995 https://doi.org/10.1016/0924-4247(96)80138-5