Journal of the Korean Ceramic Society (한국세라믹학회지)

The Korean Ceramic Society (한국세라믹학회)
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Physical Properties of ZnO Thin Films Grown by Sol-Gel Process with Different Preheating Temperatures

예열 온도 변화에 따른 Sol-Gel 법에 의해 제작된 ZnO 박막의 물리적 특성 연구

  • 김익주 (LG 생산기술원) ;
  • 한호철 (성균관대학교 정보통신용 신기능성 소재 및 공정연구센터) ;
  • 이충선 (아주대학교 물리학과) ;
  • 송용진 (아주대학교 물리학과) ;
  • 태원필 (인하대학교 소재연구소) ;
  • 서수정 (성균관대학교 정보통신용 신기능성 소재 및 공정연구센터) ;
  • 김용성 (성균관대학교 정보통신용 신기능성 소재 및 공정연구센터)
  • Published : 2004.01.01
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Abstract

A homogeneous and stable ZnO sol was prepared by dissolving the zinc acetate dihydrate(Zn(CH$_3$COO)$_2$$.$2H$_2$O) in solution of isopropanol((CH$_3$)$_2$$.$CHOH) and monoethanolamine(MEA:H$_2$NCH$_2$CH$_2$OH). ZnO thin films were prepared by sol-gel spin-coating method and investigated for c-axis preferred orientation and physical properties with preheating temperature. The c-axis growth had a difference as increaing preheating temperature. ZnO thin film preheated at 275$^{\circ}C$ and post-heated at 650$^{\circ}C$ was highly oriented along the (002) plane. After preheating at 200∼300$^{\circ}C$ and post-heating at 650$^{\circ}C$, the transmittance of ZnO thin films by UV-vis. measurement was over 85% in visible range and exhibited absorption edges at about 370 nm. The optical band gap energy was obtained about 3.22 eV, The photoluminescence emission characteristics of ZnO thin film preheated at 275$^{\circ}C$ and post-heated at 650$^{\circ}C$ was found to orange emission(620 nm, 2.0 eV) by PL measurement, which revealed the possibility for application of inorganic photoluminescence device.

출발물질로 zinc acetate dihydrate(Zn($CH_3$COO)$_2$$.$2$H_2O$)를 사용하였고, 이 물질을 isopropanol(($CH_3$)$_2$CHOH)-monoethanolamine(MEA:H$_2$NCH$_2$C$H_2O$H) 용액에 용해하여 균일하고 안정한 sol을 만들었다. Sol-gel spin-coating 법에 의해 ZnO 박막을 제조시 예열 온도에 따른 박막의 c-축 배향성과 그 물리적 특성을 조사하였다. c-축으로의 성장은 예열 온도의 변화에 따라 차이를 보였으며. 275$^{\circ}C$에서 예열 후 $650^{\circ}C$에서 최종 열처리한 ZnO 박막은 XRD 측정결과 기판에 수직한 (002) 방향으로 강한 배향성을 나타내었다 200∼30$0^{\circ}C$에서 예열 후, $650^{\circ}C$에서 최종 열처리한 ZnO 박막은 UV-vis측정결과 가시광선 영역에서 온도에 따른 투과도의 변화를 보이지만 평균 85% 이상의 높은 투과도를 보였다. 또한 370nm 부근에서 흡수단을 나타내었으며, 광학적 밴드갭은 약 3.22 eV로 나타났다. 발광방출(PL) 측정결과, 황색(620nm, 2.0 eV)발광이 관찰되어, 무기발광 소자로의 응용 가능성을 나타내었다.

Keywords

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