Transactions of the Korean Society of Mechanical Engineers B (대한기계학회논문집B)

The Korean Society of Mechanical Engineers (대한기계학회)
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Correlation Between Spray Characteristics and Etching Characteristics in Twin Spray

이중분무에서 분무특성과 에칭특성의 상호상관

  • 정지원 (부산대학교 기계기술연구소) ;
  • 김영진 (부산대학교 대학원 기계공학과) ;
  • 김덕줄 (부산대학교 기계공학부)
  • Published : 2004.04.01
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Abstract

The objective of this study is to obtain the correlation between the spray characteristics and the etching characteristics for the optimization of etching system in the micro fabrication industry. The etching characteristics such as etching rate were measured under different conditions. The single spray characteristics such as droplet size and velocity were measured by PDA system. These were compared to the etching characteristics. The twin spray characteristics in the overlap region were analyzed to predict the effect of them on the etching characteristics with the pitch and also were compared to the single spray. The etching rate was increased in case of high spray pressure and in the region of spray center. It was found that the etching characteristics could be correlated with the single spray characteristics and the twin spray characteristics were correlated with the etching characteristics.

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References

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