Journal of the Korean Society for Precision Engineering (한국정밀공학회지)

Korean Society for Precision Engineering (한국정밀공학회)
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Development of an Inductive Position Sensor Using Magnetic Bearing Technology

자기 베어링 기술을 이용한 유도형 변위센서 개발

  • 노명규 (충남대학교 메카트로닉스공학과) ;
  • 박병철 (충남대학교 대학원 메카트로닉스공학과) ;
  • 노승국 (한국기계연구원 지능형정밀기계연구부) ;
  • 경진호 (한국기계연구원 지능형정밀기계연구부) ;
  • 박종권 (한국기계연구원 지능형정밀기계연구부)
  • Published : 2004.04.01
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Abstract

In this paper, a development of an inductive position sensor is described. The sensor is similar to a radial magnetic bearing in that the sensor stator is shaped like a heteropolar magnetic bearing and is driven by a switching amplifier. A demodulation filter extracts the gap information from the switching current ripples. A prototype sensor exhibits the resolution of $0.43\mum$ and the dynamic bandwidth of about 800Hz. The dynamic performance can be improved by increasing the switching frequency. However, the eddy current effects become noticeable at high switching frequency, thus limiting the improvement of the bandwidth.

Keywords

References

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