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Design/Manufacturing/Performance-Test of Stacked Ceramic Thin Actuation Layer IDEAL Using Interdigitated Electrodes

빗살형 전극을 이용한 적층 세라믹 박판 작동층 IDEAL의 설계/제조/성능시험

  • 이제동 (건국대학교 기계항공공학부 항공우주공학전공) ;
  • 박훈철 (건국대학교 기계항공공학부 항공우주공학전) ;
  • 구남서 (건국대학교 기계항공공학부 항공우주공학전) ;
  • 윤영수 (건국대학교 신기술융합학) ;
  • 윤광준 (건국대학교 기계항공공학부 항공우주공학전공)
  • Published : 2004.03.01

Abstract

This paper is concerned with the development of stacked ceramic thin actuation layer IDEAL (InterDigitated Electrode Actuation Layer) using d$_{33}$ actuation mechanism of piezoelectric ceramic. Most of the thin piezoelectric actuators are operated with d$_{31}$ actuation mechanism. Many kinds of piezoelectric ceramic actuators are strived now to improve the actuation performance. One of efforts to improve performance of piezoceramic actuators is the research trying to develop an actuator using the piezoelectric coefficient d$_{33}$ . The piezoelectric coefficient d$_{33}$ is almost twice larger than piezoelectric coefficient d$_{31}$ . Therefore, the induced strain of PZT thin layer with d$_{33}$ 3 actuation mechanism is bigger than that with d$_{31}$ actuation mechanism. The AFC(MIT) and LaRC-MFC$^{TM}$ which is developed by a research team of NASA Langley Research Center used d$_{33}$ actuation mechanism with surface interdigitated electrode to enhance its actuation performance. But their actuation mechanism is not perfect d$_{33}$ actuation mechanism since the interdigitated electrodes are placed at the surface of the actuation layer. In this research, the stacked ceramic thin actuation layer with imbedded interdigitated electrode is designed and manufactured. The actuation strain of stacked ceramic thin actuation layer is measured and compared with the actuation strain of the LaRC-MFC$^{TM}$. The comparison shows that the developed stacked ceramic thin actuation layer can produce 15% more actuation strain than LaRC-MFC$^{TM}$.> TM/.

본 논문은 압전세라믹의 압전상수 d$_{33}$ 를 이용한 적층 세라믹 박판 작동층 IDEAL (InterDigitated Electrode Actuation Layer)의 개발에 관한 것이다. 대부분의 박판 압전 작동층은 압전상수 d$_{31}$ 효과를 이용하고 있다. 현재 개발된 압전작동기의 성능을 향상시키기 위해 많은 연구가 수행 중에 있으며, 그 중 한 방법이 압전상수 d$_{33}$ 를 이용하는 방법이다. 압전세라믹의 압전상수 d$_{33}$ 는 압전상수 d$_{31}$ 보다 일반적으로 두배 정도이기 때문에 d$_{33}$ 작동 효과를 활용하면 작동기의 성능을 향상시킬 수 있다. 미국 MIT에서 개발된 AFC와 NASA Langley 연구소 연구팀이 개발한 LaRC-MFC$^{TM}$는 d$_{33}$ 작동 효과를 활용하였으나 빗살형 전극이 작동층 상하 표면에 부착되어 있어 완전한 d$_{33}$ 작동 효과를 활용하였다고 볼 수 없다. 본 논문에서는 빗살형 전극을 세라믹 층간에 삽입한 적층형 세라믹 박판 작동층을 설계하고 제작하였다. 제작된 작동층의 작동 스트레인을 측정하였고 LaRC-MFC$^{TM}$의 작동 스트레인과 비교한 결과, 본 연구에서 개발한 박판 세라믹 작동층이 15% 이상의 작동 스트레인을 발생시킬 수 있음을 확인하였다.

Keywords

References

  1. Proc. of SPIE Conference v.3040 Rainbow Actuators and Sensors : A New Smart Technology G.H.Haertiling
  2. Sensors and Actuators v.A69 Displacement Properties of RAINBOW and THUNDER Piezoelectric Actuators S.A.Wise
  3. Proc. of SPIE Conference v.3675-05 Characterization of Different Types of High Performance THUNDER K.M.Mossi;R.P.Bishop
  4. NASA Technical Memorandum 4767 A Feasibility Study to Control Airfoil Shape Using THUNDER J.L.Pinkerton;R.W.Moses
  5. SPIE's 9th annual International Symposium on Smart Structures and materials Experimental Performance Evaluation of Light-Weight Piezo-Composite Curved Actuators K.H.Park;Y.B.Kim;Y.S.Kim;H.C.Park;K.J.Yoon
  6. International J. of Modern Physics B v.17 no.3-4 Analysis of LIPCA Autuators N.S.Goo;K.J.Yoon
  7. SPIEs $10^{th}$ Annual Interrnational Symposium on Smart Structures and Materials Enhanced Performance Active Fiber Composite R.Gentilman;K.McNeal;G.Schmidt;A.Pizzochero;G.A.Rossetti;Jr.
  8. SPIE's 7th Annual International Symposium on Smart Structures and Materials Low-Cost Piezocomposite Actuator for Structural Control Applications W.K.Wilkie;R.G.Bryant;J.W.High;R.L.Fox;R.F.Hellbaum;A.Jalink;Jr;B.D.Little;P.H.Mirick
  9. Piezoelectric actuators can be generally characterized by the piezoelectric coefficients that they exploit