소성∙가공 (Transactions of Materials Processing)

  • 제13권4호
  • /
  • Pages.326-333
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  • 2004
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  • 1225-696X(pISSN)
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  • 2287-6359(eISSN)
한국소성∙가공학회 (The Korean Society for Technology of Plasticity and materials processing)
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나노/마이크로 PDMS 채널 제작을 위한 마스크리스 실리콘 스템퍼 제작 및 레오로지 성형으로의 응용

Maskless Fabrication of the Silicon Stamper for PDMS Nano/Micro Channel

  • 윤성원 (부산대학교 대학원 정밀기계공학과) ;
  • 강충길 (부산대학교 기계공학부)
  • 발행 : 2004.07.01
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초록

The nanoprobe based on lithography, mainly represented by SPM based technologies, has been recognized as a potential application to fabricate the surface nanosctructures because of its operational versatility and simplicity. However, nanoprobe based on lithography itself is not suitable for mass production because it is time a consuming method and not economical for commercial applications. One solution is to fabricate a mold that will be used for mass production processes such as nanoimprint, PDMS casting, and others. The objective of this study is to fabricate the silicon stamper for PDMS casting process by a mastless fabrication technique using the combination of nano/micro machining by Nanoindenter XP and KOH wet etching. Effect of the Berkovich tip alignment on the deformation was investigated. Grooves were machined on a silicon surface, which has native oxide on it, by constant load scratch (CLS), and they were etched in KOH solutions to investigate chemical characteristics of the machined silicon surface. After the etching process, the convex structures was made because of the etch mask effect of the mechanically affected layer generated by nanoscratch. On the basis of this fact, some line patterns with convex structures were fabricated. Achieved groove and convex structures were used as a stamper for PDMS casting process.

키워드

참고문헌

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피인용 문헌

  1. Hydrophobic Characteristics of a Silicone Resin Surface Produced by Replicating an Electric Discharge Machined Surface vol.22, pp.1, 2013, https://doi.org/10.5228/KSTP.2013.22.1.23