Korean Journal of Optics and Photonics (한국광학회지)

Optical Society of Korea (한국광학회)
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Near field scanning optical interferometer using facet reflection of a tapered optical fiber

광섬유 탐침의 반사를 이용한 파면 분석 근접장 주사 광간섭계

  • 유장훈 (연세대학교 이과대학 물리학과) ;
  • 임상엽 (연세대학교 이과대학 물리학) ;
  • 이현호 (연세대학교 이과대학 물리학) ;
  • 박승한 (연세대학교 이과대학 물리학과)
  • Published : 2004.06.01
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Abstract

We propose a near- field scanning optical interferometer (NSOI) based on the facet reflection of a nano-sized moveable tapered optical fiber. The interferometer can measure the position and the wave-front of a focused spot simultaneously. The interfering fringes are generated by the reflected beams from the sample surface and from the fiber facet. The wave-front analysis at the focusing position is obtained by using a phase shifting technique with a four-step algorithm. It is found that the resolution for controlling the focal position of our proposed NSOI is less than λ/3 and the measured wave-front aberration at the focal position is in good agreement with the ones obtained by a Twyman-Green interferometer.

광섬유 탐침의 끝 단에서 반사하는 광을 이용하는 근접장 주사 광간섭계를 제안하고 제안한 근접장 주사 광간섭계를 이용하여 초점의 위치와 집광 초점면에서의 파면을 분석하였다. 파면의 분석은 광섬유 탐침의 끝 단에서 반사된 빛과 시료표면에서 반사된 빛을 간섭시키고, 탐침의 끝 단을 λ/4씩 위상천이 시키면서 4장의 간섭무늬를 얻은 후, 위상천이 알고리즘을 통하여 광학 수차를 구하는 방법을 이용하였다. 실험 결과 근접 주사시의 초점의 위치를 파장의 3분의 1 이하로 제어할 수 있음을 알 수 있었으며, 제안한 근접장 주사 광간섭계를 이용하여 구한 집광 초점면에서의 파면 수차 값이 트와이만-그린 간섭계를 이용하여 구한 파면 수차값과 잘 일치함을 확인할 수 있었다.

Keywords

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