Journal of the Korean Society for Precision Engineering (한국정밀공학회지)

Korean Society for Precision Engineering (한국정밀공학회)
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Rapid Manufacturing of 3D-Shaped Microstructures by UV Laser Ablation

UV 레이저 어블레이션에 의한 3차원 형상 미세 구조물의 쾌속제작

  • 신보성 (부산대학교 ERC/NSDM) ;
  • 양성빈 (한국기계연구원 나노공정그) ;
  • 장원석 (한국기계연구원 나노공정그) ;
  • 김재구 (한국기계연구원 나노공정그) ;
  • 김정민 (한국기계연구원 나노공정그룹)
  • Published : 2004.07.01
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Abstract

Recently, the lead-time of a product is to be shortened in order to satisfy consumer's demand. It is thus important to reduce the manufacturing time and the cost of 3D-shaped microstructures. Micro-Electro-Mechanical Systems (MEMS) and devices are usually fabricated by lithography-based methods. Above method is not flexible for the rapid manufacture of 3D-shaped microstructures because it depends on work's experiences and requires excessive cost and time for making many masks. In this paper, the effective laser micrornachining is developed to fabricate UV sensitive polymer microstructures using laser ablation. The proposed process, named by laser microRP, is a very useful method on rapid manufacturing for 3D-shaped microstructures.

Keywords

References

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