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Deposition Properties of NiCr Thin Films Prepared by Thermal Evaporation

Thermal Evaporation법으로 제조한 NiCr 박막의 증착 특성

  • Kun, Yong (Department of Advanced Materials Engineering, Chosun University) ;
  • Park, Yong-Ju (Department of Advanced Materials Engineering, Chosun University) ;
  • Choi, Seoung-Pyung (Department of Physics, Chosun University) ;
  • Jung, Jin (Department of Physics, Chosun University) ;
  • Choi, Gwang-Pyo (Research Institute of Energy Resources Technology, Chosun University) ;
  • Ryu, Hyun-Wook (Research Institute of Energy Resources Technology, Chosun University) ;
  • Park, Jin-Seong (Department of Advanced Materials Engineering, Chosun University)
  • 권용 (조선대학교 신소재공학과) ;
  • 박용주 (조선대학교 신소재공학과) ;
  • 최승평 (조선대학교 물리학과) ;
  • 정진 (조선대학교 물리학과) ;
  • 최광표 (조선대학교 에너지자원신기술연구소) ;
  • 류현욱 (조선대학교 에너지자원신기술연구소) ;
  • 박진성 (조선대학교 신소재공학과)
  • Published : 2004.06.01

Abstract

NiCr thin films were fabricated by thermal evaporation method using NiCr alloy as evaporating source. NiCr thin films were annealed at various temperatures in air atmosphere in order to investigate effects of annealing conditions on phase change, composition, and microstructures of NiCr films. Typical multilayer was formed after annealing in air atmosphere. This results from the diffusion and oxidation of Cr toward surface during annealing. In the case of annealing at 700$^{\circ}C$, large columnar grains of NiO were formed on Cr-oxide layer through the diffusion and oxidation of Ni over Cr-oxide layer. Especially, NiO layer was formed additionally on surface, sustaining the underlayer structure with the formation of porous Ni layer.

NiCr 합금을 열증발원으로 사용한 thermal evaporation법으로 NiCr박막을 $Al_2$O$_3$/Si 기판 위에 증착시켰다. 이 때 동일한 량의 NiCr 합금을 1회에 모두 증착하는 방법과, l/2씩 2회 증착하는 방법으로 NiCr 박막을 각각 증착시켜, 박막의 미세구조에 따른 막의 특성변화를 고찰하였으며, 열처리 온도에 따른 NiCr 박막의 상 변화, 조성변화 및 미세구조 변화를 XRD, AES 및 FE-SEM으로 각각 분석하였다. 열처리 과정에서 박막내부에 존재하는 Cr 성분이 표면 쪽으로 확산하여 산화됨으로써 Cr산화층/Ni 층/Cr 산화층의 전형적인 다층구조를 형성함을 알 수 있었으며, 특히, $700^{\circ}C$ 이상에서는 Ni 층이 Cr산화층을 통하여 표면 쪽으로 확산됨으로써 표면에 원주형 결정립을 가지는 NiO 층을 형성하였다. 특히 Ni 층이 확산 전의 구조를 유지한 채 표면에 추가적인 NiO층이 형성되는데, 이는 형성된 Cr산화층의 확산이 상대적으로 Ni 층에 비하여 어려운데 기인한다.

Keywords

References

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