Journal of the Korean Ceramic Society (한국세라믹학회지)

The Korean Ceramic Society (한국세라믹학회)
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Fabrication and Characterization of Macro/Mesoporous SiC Ceramics from SiO2 Templates

실리카 주형을 이용한 메크로/메조다공성 탄화규소 세라믹의 제조와 비교특성

  • ;
  • Hao Wang (Key Lab of Ceramic Fiber and Composites, National University of Defense Technology, Chin) ;
  • ;
  • 홍난영 (충남대학교 신소재연구소) ;
  • ;
  • 박경훈 (충남대학교 공과대학 정밀공업화학) ;
  • 김동표 (충남대학교 공과대학 정밀공업화학과)
  • Published : 2004.07.01
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Abstract

Macroporous SiC with pore size 84∼658 nm and mesoporous SiC with pore size 15∼65 nm were respectively prepared by infiltrating low viscosity preceramic polymer solutions into the various sacrificial templates obtained by natural sedimentation or centrifuge of 20∼700 nm silica sol, which were subsequently etched off with HF after pyrolysis at 1000∼140$0^{\circ}C$ in an argon atmosphere. Three-dimensionally long range ordered macroporous SiC ceramics derived from polymethylsilane (PMS) showed surface area 584.64$m^2$g$^{-1}$ when prepared with 112nm silica sol and at 140$0^{\circ}C$, whereas mesoporous SiC from polycarbosilane (PCS) exhibited the highest surface area 619.4 $m^2$g$^{-1}$ with random pore array when prepared with 20-30 nm silica sol and at 100$0^{\circ}C$. Finally, tile pore characteristics of porous SiC on the types of silica sol, polymers and pyrolytic conditions were interpreted with the analytical results of SEM, TEM, and BET instruments.

입자크기가 20∼700nm인 구형 실리카입자의 자연침강 혹은 원심분리법으로 제조한 주형체에 탄화규소 전구체 polymethyl-silane (PMS) 혹은 polycarbosilane (PCS) 고분자 용액을 함침한다음, 가교 및 1000∼140$0^{\circ}C$ 열분해하고 마지막으로 불산 (HF)으로 실리카를 식각하여 84∼658nm 기공이 3차원으로 정렬된 메크로다공성(macroporous) 탄화규소 세라믹과 불규칙적인 15∼65nm 기공을 가진 메조다공성(mesoporous) 탄화규소 세라믹을 제조하였다. 전자는 112nm 실리카 입자 주형체를 사용하여 140$0^{\circ}C$로 처리했을 때, 표면적 584.64$m^2$g$^{-1}$을 나타낸 반면, 후자는 20-30nm 실리카 주형체를 사용하여 100$0^{\circ}C$로 처리하였을때, 최대의 표면적 619.4$m^2$g$^{-1}$를 나타내었다, 이와 같이 사용된 실리카 입자, 고분자 전구체, 그리고 열처리 조건에 따른 기공특성을 SEM. TEM 및 BET으로 분석 설명하였다.

Keywords

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