한국광학회지 (Korean Journal of Optics and Photonics)

  • 제15권4호
  • /
  • Pages.331-336
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  • 2004
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  • 1225-6285(pISSN)
  • /
  • 2287-321X(eISSN)
한국광학회 (Optical Society of Korea)
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백색광주사간섭계에서 편광을 고려한 반사시 위상 변화에 대한 연구

Phase change on reflection in a white-light interferometer as polarization is changes

  • 김영식 (한국과학기술원 기계공학과 BUPE연구단) ;
  • 김승우 (한국과학기술원 기계공학과 BUPE연구단)
  • 발행 : 2004.08.01
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⟨ 이전 논문 다음 논문 ⟩

초록

백색광주사간섭계는 금속 물질의 반사시 발생하는 위상 변화에 의해 금속의 두께 측정에서 수십 나노 미터(nm)의 오차를 갖는다. 실제로 반도체 공정이나 초 정밀가공 부품에 많이 쓰이는 금, 은, 알루미늄, 크롬 등의 금속은 약 10∼30 nm의 측정 오차를 야기 시킨다. 본 논문에서는 수치 해석을 통해 백색광의 편광을 고려한 반사시 위상 변화에 의해서 간섭무늬의 두 정점, 위상 정점과 가시도 정점이 이동함을 보인다. 또한 백색광의 두 편광성분, 수직 편광성분과 수평 편광성분에 의해 재구성된 간섭 무늬식을 제안한다.

The phase change due to the reflection from target surfaces in a white-light interferometer induces measurement errors when target surfaces are composed of dissimilar materials. We prove that this phase change on reflection as the polarization of the white-light changes causes a shift of both envelope peak position and fringe peak position of several tens of nanometers as the polarization of the white-light changes. In addition, we propose a new equation for white-light interference fringes depending on the polarization of the source.

키워드

참고문헌

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