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Effect of Vertical Clearance Between a Rotor and Stater of a Disk-Type Drag Pump on the Performance

원판형 드래그펌프 회전자와 고정자 사이의 간극이 성능에 미치는 영향

  • 권명근 (성균관대학교 대학원 기계설계학과) ;
  • 황영규 (성균관대학교 기계공학부)
  • Published : 2004.12.01

Abstract

The pumping characteristics of a single-stage disk-type drag pump (DTDP) are calculated for the variation of the vertical clearance between a rotor and stator by the three-dimensional direct simulation Monte Carlo (DSMC) method. The gas flow mainly belongs to the molecular transition flow region. Spiral channels of a DTDP are cut on the both the upper and lower sides of a rotating disk, but a stationary disk is planar. The interaction between molecules is described by the variable hard-sphere model. The no time counter method is used as a collision sampling technique. The vertical clearance has a significant effect on the pumping performance. Experiments are performed under the outlet pressure range of 0.4∼533 Pa. When the numerical results are compared with the experimental data, the numerical results agree well quantitatively

Keywords

References

  1. Hablanian, M. H., 1990, High Vacuum Technology(A Practical Guide), Marcel Dekker, Inc.
  2. Hablanian, M. H., 1994, In Vacuum Science and Technology: Pioneers of 20th Century, edited by P. A. Redhead(AIP, New York), pp. 126-132
  3. Chu, J. G., 1988, 'A New Hybrid Molecular Pump with Large Throughput,' J. Vac. Sci. Technol. A, Vol. 6, No. 3, pp. 1202-1204 https://doi.org/10.1116/1.575677
  4. Tu, J. Y., Zhu, Y. and Wang, X. Z., 1990, 'A New Design for the Disk-Type Molecular Pump,' J. Vac. Sci. Technol. A, Vol. 8, No. 5, pp. 3870-3873 https://doi.org/10.1116/1.576461
  5. Liu, N. and Pang, S. J., 1990, 'Microscopic Theory of Drag Molecular Dynamics in the Range of Free Molecular Flow,' Vacum, Vol. 41, No. 7-9, pp. 2015-2017 https://doi.org/10.1016/0042-207X(90)94162-J
  6. Shi, L., Wang, X. Z., Zhu, Y. and Pang, S. J., 1993, 'Design of Disk Molecular Pumps for Hybrid Molecular Pumps,' J. Vac. Sci. Technol. A, Vol. 11, No. 2, pp. 426-431 https://doi.org/10.1116/1.578748
  7. Shi, L. and Yang, N. H., 1988, 'A New Method for Calculating the Pumping Performance of Turbomolecular Pumps Using the Oatley Equation,' Vacum, Vol. 44, No. 5-7, pp. 725-727
  8. Shi, L., Zhu, Y., Wang, X. Z. and Pang, S. J., 1993, 'Influence of Clearance on the Pumping Performance of a Molecular Drag Pump,' J. Vac. Sci. Technol. A, Vol. 11, No. 3, pp. 704-710 https://doi.org/10.1116/1.578795
  9. Heo, J. S., Hwang, Y. K. and Park, C. Y., 1999, 'A Study of the Numerical Method on the Molecular Transition Flow for the Rotating Blades,' Journal of the Korean Vacuum Society, Vol. 8, No. 2, pp. 83-92
  10. Hwang, Y. K., Heo, J. S. and Choi, W. J., 2000, 'A Study on the Pumping Performance of a Disk-type Drag Pump,' Trans. of the KSME B, Vol. 24, No. 6, pp. 860-869
  11. Heo, J. S. and Hwang, Y. K., 2000, 'Molecular Transition and Slip Flows in the Pumping Channels of Drag Pumps,' J. Vac. Sci. Technol. A, Vol. 18, No. 3, pp. 1025-1034 https://doi.org/10.1116/1.582294
  12. Heo, J. S. and Hwang, Y. K., 2002, 'Performance Characteristics of Single-Stage Disk-Type Drag Pump,' J. Vac. Sci. Technol. A, Vol. 20, No. 5, pp. 1621-1631 https://doi.org/10.1116/1.1495512
  13. Bird, G. A., 1994, Molecular Gas Dynamics and the Direct Simulation of Gas Flows, Clarendon Press, Oxford
  14. Borgnakke, C. and Larsen, P. S., 1975, 'Statistical Collision Model for Monte Carlo Simulation of Polyatomic Gas Mixture,' J. Comput. Phys., Vol. 18, pp. 405-420 https://doi.org/10.1016/0021-9991(75)90094-7