Journal of the Korea Institute of Information and Communication Engineering (한국정보통신학회논문지)

The Korea Institute of Information and Commucation Engineering (한국정보통신학회)
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Breakdown Voltage Characteristics of LDMOST with External Field Ring

외부 전계 링을 갖는 LDMOST의 항복전압 특성

  • 오동주 (한밭대학교 정보통신전문대학원) ;
  • 염기수 (한밭대학교 정보통신컴퓨터공학부)
  • Published : 2004.12.01
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Abstract

In this paper, we have proposed a new structure of LDMOST, which has been expected as a next generation RF power device, to improve the BV(Breakdown Voltage) characteristics. The proposed structure, named external field ring, is formed around a drift region by the three dimensional structure. The external field ring relieves the electric field in the drift region and improves the BV characteristics. By the three dimensional TCAD simulations, it was found that the BV of LDMOST was increased by the increase of the junction depth and doping concentration of the external field ring. Therefore, the BV characteristics of the LDMOST can be remarkably improved by addition of external field ring using an existing p+ sinker process.

본 논문에서는 차세대 RF 전력 소자로 기대하고 있는 LDMOST의 BV(Breakdown; 항복전압) 특성을 향상시키는 새로운 구조를 제안하였다. 제안한 구조는 외부 전계 링이라 하며 드리프트 영역 둘레에 3차원적인 구조로 형성된다. 외부 전계 링은 드리프트 영역에서 전계를 완화시키는 역할을 함으로써 BV 특성을 향상시키는 효과를 얻을 수 있다. 3차원 TCAD 시뮬레이션 결과, 외부 전계 링의 접합깊이와 도핑 농도의 증가에 따라 LDMOST의 BV가 증가함을 확인할 수 있었다. 따라서 기존의 p+ sinker 공정을 사용하여 외부 전계 링 구조를 추가한다면 LDMOST의 BV 특성을 크게 향상 시킬 수 있다.

Keywords

References

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