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New Fabrication Method of the Electron Beam Microcolumn and Its Performance Evaluation

초소형 전자칼럼의 제작 및 특성 연구

  • 안승준 (선문대학교 자연과학부 신소재과학과/차세대반도체기술연구소) ;
  • 김대욱 (선문대학교 자연과학부 신소재과학과/차세대반도체기술연구소) ;
  • 김영철 (선문대학교 자연과학부 신소재과학과/차세대반도체기술연구소) ;
  • 안성준 (선문대학교 전자정보통신공학부) ;
  • 김영정 (선문대학교 공과대학 재료공학부) ;
  • 김호섭 (선문대학교 자연과학부 신소재과학과/차세대반도체기술연구소)
  • Published : 2004.03.01

Abstract

An electron beam microcolumn composed of an electron emitter, micro lenses, scan deflector, and focus lenses have been fabricated and tested in the STEM mode. In this paper, we report a technique of precisely aligning the electron lenses by the laser diffraction patterns instead of the conventional alignment method based on aligner and STM. STEM images of a standard Cu-grid were observed using a fabricated microcolumn under both the retarding and accelerating modes.

Keywords

References

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