Korean Journal of Materials Research (한국재료학회지)

Materials Research Society of Korea (한국재료학회)
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Effect of a Reciprocating Paddle on the Electrodeposit Uniformity of Patterned Cathodes

왕복패들이 패턴화된 음극의 전착균일성에 미치는 영향

  • 오영주 (한국과학기술연구원 금속공정연구센터) ;
  • 정순효 (한국과학기술연구원 금속공정연구센터)
  • Published : 2004.03.01
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Abstract

A numerical simulation based on the finite element method is used to investigate the effect of a reciprocal paddle on the uniformity of deposition rates at a patterned electrode. The calculated deposition rates agreed well with the measured values. The influences of the paddle velocity, the gap between cathodes and paddles, anode size and the distance between the anode and cathode have been studied. The optimum conditions on the paddle and geometric factors for electrodeposit uniformity could be obtained.

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References

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