Journal of Sensor Science and Technology (센서학회지)

The Korean Sensors Society (한국센서학회)
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Development of nano-positioner using fiber optic EFPI sensor

광섬유 EFPI 센서를 이용한 나노 이송장치의 개발

  • Park, Sang-Wuk (Dep. of Mechanical Eng. Div. of Aerospace Eng., KAIST) ;
  • Kim, Dae-Hyun (Civil & Environmental Engineering, University of California, Irvine) ;
  • Kim, Chun-Gon (Dep. of Mechanical Eng. Div. of Aerospace Eng., KAIST)
  • 박상욱 (한국과학기술원 기계공학과 항공우주) ;
  • 김대현 (U. C. Irvine 토목공학과) ;
  • 김천곤 (한국과학기술원 기계공학과 항공우주)
  • Published : 2005.09.30
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Abstract

Precision displacement of less than a few nm resolution was measured in real-time using fiber optic EFPI sensor. The novel method for real-time processing of analyzing EFPI output signal was developed and verified. Linearity in the mean values of interferometric light intensity among adjacent fringes was shown and verified the sinusoidal approximation algorithm that estimates past and coming fringe values. Real-time signal processing program was developed and the intensity signal of the EFPI sensor was transformed to the phase shift with this program. The resolution below $0.36{\sim}8.6$ nm in the displacement range of $0{\sim}300{\mu}m$ was obtained. The nano-positioner with a piezoelectric actuator and the EFPI sensor system was designed and tested. The positioner successfully reached to the desired destination within 1 nm accuracy.

Keywords

References

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